Citation:
Diao Peng, Cai Shengmin, Li Jingjian, Chen Yong, Zhang Shulin. Recent Progroess of Research on Porous Silicon[J]. Chinese Journal of Applied Chemistry,
;1994, 11(4): 1-7.
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Porous silicon (PS) is a kind of new material which has great potential applications in developing super large scale integrated circuits and all silicon optointergrated circuits,In this paper,different formation conditions of PS are reviewed,and the latest developments of the research on its physical and chemical properties and formation mechanism ar epresented.Applications in manufacturing PS Iight emitting devices and other fields are discussed.
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Keywords:
- porous silicon,
- fortmation,
- physical property,
- application,
- review
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