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Citation: YANG Xing-Xing, ZOU Ying-Quan. Synthesis and Acid-generation Efficiency of Sulfonium Photoacid Generators[J]. Chinese Journal of Applied Chemistry, ;2009, 26(10): 1194-1199. shu

Synthesis and Acid-generation Efficiency of Sulfonium Photoacid Generators

YANG Xing-Xing ,
ZOU Ying-Quan ^,

1.
College of Chemistry, Beijing Normal University, Beijing 100875

Corresponding author: ZOU Ying-Quan,
Received Date: 16 September 2008
Available Online: 7 January 2009

Six sulfonium photoacid generators(PAGs) which were used in 248 nm photoresists were synthesized,some of which were innovated by our lab for the first time. The synthesis method is very simple and environment-friendly,with high yields at the same time. All the PAGs were identified by IR,HNMR and UV. The max wavelengths of ultraviolet absorption are between 250 nm and 285 nm,and the absorption region are so wide that these PAGs can be used extensively. We used rhodamine B and ultraviolet spectrophotometer to evaluate the acid-generation efficiency of the PAGs in acetonitrile because rhodamine B will change colour by the change of acid concentration. The PAGs synthesized by thioxanthen-9-one and isopropylthioxanthen-9-one were choosed as the best ones. We also studied how the solvent affect the acid-generation by fluorescence,and found that the acid-generation efficiency would be depressed by the decrease of the solvent's polarity. All the work about the PAGs can provide an important reference to 248 nm photoresists.
- sulfonium salt,
- photoacid generator,
- acid-generation efficiency
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