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Citation: JI Hui-Ming, ZHANG Ying, XU Ting-Xian. Preparation of SrBi₂Ta₂O₉ Ferroelectric Ceramic Thin Films by Sol-Gel Method[J]. Chinese Journal of Applied Chemistry, ;2002, 19(6): 531-534. shu

Preparation of SrBi₂Ta₂O₉ Ferroelectric Ceramic Thin Films by Sol-Gel Method

1.
Education Ministry Key Laboratory for High Temperature Structure Ceramics and Machining Technology, Tianjin University, Tianjin 300072

Corresponding author: JI Hui-Ming,
Received Date: 29 September 2001
Available Online: 27 February 2002
Fund Project: 国家自然科学基金资助重大项目(59995520) (59995520)

A sol-gel method was developed for the preparation of SrBi₂Ta₂O₉(SBT) ferroelectric ceramic thin films using soluble inorganic salts Sr(NO₃)₂、Bi(NO₃)₃ and HTaF₆ in the presence of citric acid, EDTA and ethylene glycol as organic coordina-tion agents. The results showed that the coordination agents in the precursor solution are an important factor affecting the stability of sol and formation of SBT phase. The solution coordinated with EDTA and glycol could form a stable and homogeneous sol and produce a single SBT phase thin films by spin coat approach on Al₂O₃ substrate. The effects of volatility of Bi₂O₃ at high temperature and the annealing temperatures of the films on the preparation were also discussed. A smooth, well crystallized, stoichiometric SrBi₂Ta₂O₉ ferroelectric thin film with uniform crystallite size could be obtained on Al₂O₃ substrate at calcining temperature of 700℃ in an oxygen atmosphere from the Bi being feeded in excess of 40%.
- sol-gel,
- thin films,
- SrBi₂Ta₂O₉,
- preparation
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Preparation of SrBi₂Ta₂O₉ Ferroelectric Ceramic Thin Films by Sol-Gel Method