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Citation: ZHAO Jie, ZHAO Jing-Gui, GAO Shan, HUO Li-Hua, WANG Hai-Shui, XI Shi-Quan. Preparation, Microstructure and Gas Sensitivity of SnO₂ Thin Films[J]. Chinese Journal of Applied Chemistry, ;2004, 21(2): 122-125. shu

Preparation, Microstructure and Gas Sensitivity of SnO₂ Thin Films

1.
a College of Chemistry and Chemical Technology, Heilongjiang University, Harbin 150080;
2.
b Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun

Corresponding author: HUO Li-Hua,
Received Date: 16 May 2003
Available Online: 15 September 2003
Fund Project: 国家自然科学基金(20101003) (20101003)

Transparent SnO₂ sols were obtained by a sol-gel method from SnCl₂·2H₂O in absolute ethanol, and SnO₂ thin films were prepared by dip-coating technique. The microstructure of thin films has been studied by XRD、AFM and UV-Vis spectra analysis. The average size of the spherical SnO₂ particles obtained is 5 nm. The absorbance of the film increases linearly with the ply deposited. The sheet resistance of the multi-ply SnO₂ decreases with the increase of the film thickness to a constant value. The thin films have good sensitivity and response-recovery properties to ethanol and acetone from 100 to 1 000 μL/L at room temperature. The response and recovery times of the film to 800 μL/L gas are 30 and 60 s, respectively.
- SnO₂ thin film,
- sol-gel method,
- gas sensitivity
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Preparation, Microstructure and Gas Sensitivity of SnO₂ Thin Films