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Citation: LIU Zhu-Fang, JIANG Li-Min, Tang Jing, LIU Pin-Kuan, SUN Li-Ning, TIAN Zhong-Qun, TIAN Zhao-Wu. Chemical Microetching of Three-dimensional Gear-like Patterns on Copper Surface[J]. Chinese Journal of Applied Chemistry, ;2004, 21(3): 227-230. shu

Chemical Microetching of Three-dimensional Gear-like Patterns on Copper Surface

1.
a State Key Laboratory for Physical Chemistry of Solid Surfaces, Department of Chemistry, Xiamen University, Xiamen 361005;
2.
b The Institute of Robots, Harbin University of Technology, Harbin

Corresponding author: TIAN Zhao-Wu,
Received Date: 13 June 2003
Available Online: 30 September 2003
Fund Project: 科技部"八六三"计划资助项目(2002AA404170) (2002AA404170)

The chemical microetching on copper surface with three-dimensional(3D) gear-like molds was realized by confined etchant layer technique(CELT). By using effective chemical etching and scavenging system(HNO₃+NaOH) and the optimized experimental parameters, such as the etching time, etching current density, concentration of etchant or scavenger, the etched patterns were obtained, which is close to negative copy of the mold. The etched micro-patterns characterized by SEM and AFM demonstrates that CELT can be applied to the 3D-microstructure replication on copper surface.
- confined etchant layer technique(CELT),
- copper metal,
- 3D-microfabrication,
- chemical etching
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