Citation: LIANG Jian, LIU Hai-Rui, WANG Xiao-Ning, DONG Hai-Liang, JIA Wei, JIA Hu-Sheng, XU Bing-She. Fabrication of GaN Film by Two Step Methods and Transformation of Physical Properties[J]. Chinese Journal of Inorganic Chemistry, ;2013, 29(5): 1019-1024. doi: 10.3969/j.issn.1001-4861.2013.00.121 shu

Fabrication of GaN Film by Two Step Methods and Transformation of Physical Properties

LIANG Jian ^1,2,, ,
LIU Hai-Rui ^1,2 ,
WANG Xiao-Ning ^1,2 ,
DONG Hai-Liang ^1,2 ,
JIA Wei ^1,2 ,
JIA Hu-Sheng ^1,2 ,
XU Bing-She ^1,2

1.
1. Key Laboratory of Interface Science and Engineering in Advanced Materials Taiyuan University of Technology, Ministry of Education, Taiyuan 030024, China;

Corresponding author: LIANG Jian,
Received Date: 18 October 2012
Available Online: 25 December 2012
Fund Project: 高校长江学者和创新团队(No.IRT0972) (No.IRT0972)山西省研究生优秀创新项目 (20113033) 资助项目。 (20113033)

The GaOOH film composed of spindle-shaped GaOOH microparticles was firstly fabricated by hydrothermal method on Si substrate spun with ZnO particles, and then ammoniated at 950 ℃ by CVD method to give GaN film. The morphologies, crystal structure and optical properties of the samples before and after ammoniation were characterized by FESEM, EDS, TEM, XRD and PL analyses. The results show that the GaOOH film was composed of spindle-shaped microrods with a diameter of 600 nm and a length of about 1.5～2 μm. Ammoniation did not change the morphologies of GaOOH film but converted its crystal structure from orthorhombic phase of GaOOH into wurtzite GaN; and the position of PL peak at the green light range for GOOH films shifted to blue range with a peak at 365 nm, which may be related to the transformation of crystal structure. Finally, the formation mechanism of GaOOH film and the chemical reaction during the transformation from GaOOH film to GaN film were proposed.
- GaOOH film;GaN film;hydrothermal method;ammoniation
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