Citation: XIA Ji-Ye, DONG Guo-Dong, TIAN Bo-Yuan, YAN Qiu-Ping, HAN Jie, QIU Song, LI Qing-Wen, LIANG Xue-Lei, PENG Lian-Mao. Contact Resistance Effects in Carbon Nanotube Thin Film Transistors[J]. Acta Physico-Chimica Sinica, ;2016, 32(4): 1029-1035. doi: 10.3866/PKU.WHXB201601292 shu

Contact Resistance Effects in Carbon Nanotube Thin Film Transistors

1.
1. Key Laboratory for the Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, P. R. China;
2.
2. Suzhou Institute of Nano-Tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu Province, P. R. China

Corresponding author: LIANG Xue-Lei,
Received Date: 11 December 2015
Available Online: 29 January 2016
Fund Project: 国家自然科学基金(61321001) (61321001) 北京市科学技术委员会(Z141100003814006) (Z141100003814006) 教育部(113003A)资助项目 (113003A)

The contact resistance effect in the network type carbon nanotube thin film transistors (CNT-TFTs) is studied by using different contact metals. It is shown that palladium (Pd) can form an ohmic type contact with the carbon nanotube thin film, and gold (Au) forms an almost ohmic contact. On-state current and carrier mobility in the devices of these two contacts are high. In contrast, both titanium (Ti) and aluminum (Al) form Schottkytype contacts with the carbon nanotube thin film. The barrier height and the contact resistance of the Al contact are higher than those of the Ti contact. Therefore, the on-state current and carrier mobility are relatively low in the corresponding devices of these two types of contacts. These results indicate that the performance of CNTTFTs can be tuned by the contact metal, which is important for the commercialization of CNT-TFTs.
- Carbon nanotube,
- Thin film transistor,
- Contact resistance,
- Ohmic contact,
- Schottky barrier
1. [1]
  (1) Che, Y.; Chen, H.; Gui, H.; Liu, J.; Liu, B.; Zhou, C. Semicond. Sci. Tech. 2014, 29 (7), 073001. doi: 10.1088/0268-1242/29/7/073001
2. [2]
  (2) Wang, C.; Zhang, J.; Ryu, K.; Badmaey, A.; De Arco, L.G.; Zhou, C. Nano Lett. 2009, 9 (12), 4285. doi: 10.1021/nl902522f
3. [3]
  (3) Zhang, J.; Fu, Y.;Wang, C.; Chen, P.; Liu, Z.;Wei, W.;Wu, C.; Thompson, M.; Zhou, C. Nano Lett. 2011, 11 (11), 4852. doi: 10.1021/nl202695v
4. [4]
  (4) Park, S.; Vosguerichian, M.; Bao, Z. Nanoscale 2013, 5 (5), 1727. doi: 10.1039/C3NR33560G
5. [5]
  (5) Alam, M.; Pimparkar, N.; Kumar, S.; Murthy, J. MRS Bull. 2006, 31 (6), 466. doi : 10.1557/mrs2006.120.
6. [6]
  (6) Hersam, M. Nat. Nanotechnol. 2008, 3 (7), 387. doi: 10.1038/nnano.2008.135
7. [7]
  (7) Arnold, M.; Green, A.; Hulvat, J.; Stupp, S.; Hersam, M. Nat. Nanotechnol. 2006, 1 (1), 60. doi: 10.1038/nnano.2006.52
8. [8]
  (8) Tu, X.; Manohar, S.; Jagota, A.; Zheng, M. Nature 2009, 460 (7252), 250. doi: 10.1038/nature08116
9. [9]
  (9) Kim, K.; Yoon, S.; Choi, J.; Lee, J.; Kim, B.; Kim, J.; Lee, J.; Paik, U.; Park, M.; Yang, C.; An, K.; Chung, Y.; Lee, Y. Adv. Funct. Mater. 2007, 17 (11), 1775. doi: 10.1002/adfm.200600915
10. [10]
  (10) Gomulya, W.; Costanzo, G.; Carbalho, E.; Bisri, S.; Derenskyi, V.; Fritsch, M.; Frohlich, N.; Allard, S.; Gordiichuk, P.; Herrmann, A.; Marrink, S.; Santos, M.; Scherf, U.; Loi, M. Adv. Mater. 2013, 25 (21), 2948. doi: 10.1002/adma.201300267
11. [11]
  (11) Wang, H.; Mei, J.; Liu, P.; Schmidt, K.; Jimenez-oses, G.; Osuna, A.; Fang, L.; Tassone, C.; Zoombelt, A.; Sokolov, A.; Houk, K.; Toney, M.; Bao, Z. ACS Nano 2013, 7 (3), 2659. doi: 10.1021/nn4000435
12. [12]
  (12) Liu, H.; Nishide, D.; Tanaka, T.; Kataura, H. Nat. Commun. 2011, 2, 309. doi: 10.1038/ncomms1313
13. [13]
  (13) Liang, S.; Zhao, Y.; Adronov, A. J. Am. Chem. Soc. 2014, 136 (3), 970. doi: 10.1021/ja409918n
14. [14]
  (14) Wang, C.; Zhang, J.; Zhou, C. ACS Nano 2010, 4 (12), 7123. doi: 10.1021/nn1021378
15. [15]
  (15) Chen, P.; Fu, Y.; Aminirad, R.;Wang, C.; Zhang, J.;Wang, K.; Galatsis, K.; Zhou, C. Nano Lett. 2011, 11 (12), 5301. doi: 10.1021/nl202765b
16. [16]
  (16) Liu, B.;Wang, C.; Liu, J.; Che, Y.; Zhou, C. Nanoscale 2013, 5 (20), 9483. doi: 10.1039/C3NR02595K
17. [17]
  (17) Cao, X.; Chen, H.; Gu, X.; Liu, B.;Wang, W.; Cao, Y.;Wu, F.; Zhou, C. ACS Nano 2014, 8 (12), 12769. doi: 10.1021/nn505979j
18. [18]
  (18) Wang, C.; Chien, J.; Takei, K.; Takahashi, T.; Nah, J.; Niknejad, A.; Javey, A. Nano Lett. 2012, 12 (3), 1527. doi: 10.1021/nl2043375
19. [19]
  (19) Wang, C.; Takei, K.; Takahashi, T.; Javey, A. Chem. Soc. Rev. 2013, 42, 2592. doi: 10.1039/C2CS35325C
20. [20]
  (20) Zou, H. L.; Yang, Y. L.;Wu, B.; Qing, Q.W.; Li, Q.; Zhang, J.; Liu, Z. F. Acta Phys. -Chim. Sin. 2002, 18 (5), 409. [邹红玲, 杨延莲, 武斌, 卿泉, 李清文, 张锦, 刘忠范. 物理化学学报, 2002, 18 (5), 409.] doi: 10.3866/PKU.WHXB20020506
21. [21]
  (21) Tewari, A.; Gandla, S.; Rininti, A.; Karuppasam, K.; Bohm, S.; Bhattacharyya, A.; McNeill, C.; Gupta, D. Appl. Phys. Lett. 2015, 107 (10), 103302. doi: 10.1063/1.4930305
22. [22]
  (22) Bae, S.; Oh, S.; Park, L.; Choi, S.; Moon, K. J. Korean Phys. Soc. 2002, 41 (6), 1063. doi: 10.3938.jkps.41.1063
23. [23]
  (23) Choi, S.; Bennett, P.; Lee, D.; Bokor, J. Nano Research 2015, 8 (4), 1320. doi: 10.1007/s12274-014-0623-8
24. [24]
  (24) Ha, T.; Chen, K.; Chuang, S.; Yu, K.; Kiriya, D.; Javey, A. Nano Lett. 2015, 15, 392. doi: 10.1021/nl5037098
25. [25]
  (25) Javey, A.; Guo, J.;Wang, Q.; Lundstrom, M.; Dai, H. Nature 2003, 424 (6949), 654. doi: 10.1038/nature01797
26. [26]
  (26) Zhang, Z.; Liang, X.;Wang, S.; Yao, K.; Hu, Y.; Zhu, Y.; Chen, Q.; ZhouW.; Li, Y.; Yao, Y.; Zhang, J.; Peng, L. Nano Lett. 2007, 7 (12), 3603. doi: 10.1021/nl0717107
27. [27]
  (27) Chen, Z.; Appenzeller, J.; Knoch, J.; Lin, Y.; Avouris, P. Nano Lett. 2005, 5 (7), 1497. doi: 10.1021/nl0508624
28. [28]
  (28) Heinze, S.; Tersoff, J.; Martel, R.; Derycke, V.; Appenzeller, J.; Avouris, P. Phys. Rev. Lett. 2002, 89 (10), 106801. doi: 10.1103/PhysRevLett.89.106801
29. [29]
  (29) Neamen, D. Semiconductor Physics and Devices: Basic Principles, 3rd ed.; Tsinghua University, Beijing, 2003.
30. [30]
  (30) Cao, Q.; Xia, M.; Kocabas, C.; Shim, M.; Rogers, J.; Rotkin, S. Appl. Phys. Lett. 2007, 90 (2), 023516. doi: 10.1063/1.2431465
1. [1]
  Hailang JIA , Hongcheng LI , Pengcheng JI , Yang TENG , Mingyun GUAN . Preparation and performance of N-doped carbon nanotubes composite Co₃O₄ as oxygen reduction reaction electrocatalysts. Chinese Journal of Inorganic Chemistry, 2024, 40(4): 693-700. doi: 10.11862/CJIC.20230402
2. [2]
  Haihua Yang , Minjie Zhou , Binhong He , Wenyuan Xu , Bing Chen , Enxiang Liang . Synthesis and Electrocatalytic Performance of Iron Phosphide@Carbon Nanotubes as Cathode Material for Zinc-Air Battery: a Comprehensive Undergraduate Chemical Experiment. University Chemistry, 2024, 39(10): 426-432. doi: 10.12461/PKU.DXHX202405100
3. [3]
  Mengfei He , Chao Chen , Yue Tang , Si Meng , Zunfa Wang , Liyu Wang , Jiabao Xing , Xinyu Zhang , Jiahui Huang , Jiangbo Lu , Hongmei Jing , Xiangyu Liu , Hua Xu . Epitaxial Growth of Nonlayered 2D MnTe Nanosheets with Thickness-Tunable Conduction for p-Type Field Effect Transistor and Superior Contact Electrode. Acta Physico-Chimica Sinica, 2025, 41(2): 2310029-0. doi: 10.3866/PKU.WHXB202310029
4. [4]
  Bowen Yang , Rui Wang , Benjian Xin , Lili Liu , Zhiqiang Niu . C-SnO₂/MWCNTs Composite with Stable Conductive Network for Lithium-based Semi-Solid Flow Batteries. Acta Physico-Chimica Sinica, 2025, 41(2): 2310024-0. doi: 10.3866/PKU.WHXB202310024
5. [5]
  Xiufang Wang , Donglin Zhao , Kehua Zhang , Xiaojie Song . “Preparation of Carbon Nanotube/SnS₂ Photoanode Materials”: A Comprehensive University Chemistry Experiment. University Chemistry, 2024, 39(4): 157-162. doi: 10.3866/PKU.DXHX202308025
6. [6]
  Shuhong Xiang , Lv Yang , Yingsheng Xu , Guoxin Cao , Hongjian Zhou . Selective electrosorption of Cs(Ⅰ) from high-salinity radioactive wastewater using CNT-interspersed potassium zinc ferrocyanide electrodes. Acta Physico-Chimica Sinica, 2025, 41(9): 100097-0. doi: 10.1016/j.actphy.2025.100097
7. [7]
  Chen Pu , Daijie Deng , Henan Li , Li Xu . Fe_0.64Ni_0.36@Fe₃NiN Core-Shell Nanostructure Encapsulated in N-Doped Carbon Nanotubes for Rechargeable Zinc-Air Batteries with Ultralong Cycle Stability. Acta Physico-Chimica Sinica, 2024, 40(2): 2304021-0. doi: 10.3866/PKU.WHXB202304021
8. [8]
  Jie XIE , Hongnan XU , Jianfeng LIAO , Ruoyu CHEN , Lin SUN , Zhong JIN . Nitrogen-doped 3D graphene-carbon nanotube network for efficient lithium storage. Chinese Journal of Inorganic Chemistry, 2024, 40(10): 1840-1849. doi: 10.11862/CJIC.20240216
9. [9]
  Chunai Dai , Yongsheng Han , Luting Yan , Zhen Li , Yingze Cao . Ideological and Political Design of Solid-liquid Contact Angle Measurement Experiment. University Chemistry, 2024, 39(2): 28-33. doi: 10.3866/PKU.DXHX202306065
10. [10]
  Gaopeng Liu , Lina Li , Bin Wang , Ningjie Shan , Jintao Dong , Mengxia Ji , Wenshuai Zhu , Paul K. Chu , Jiexiang Xia , Huaming Li . Construction of Bi Nanoparticles Loaded BiOCl Nanosheets Ohmic Junction for Photocatalytic CO₂ Reduction. Acta Physico-Chimica Sinica, 2024, 40(7): 2306041-0. doi: 10.3866/PKU.WHXB202306041
11. [11]
  Zijuan LI , Xuan LÜ , Jiaojiao CHEN , Haiyang ZHAO , Shuo SUN , Zhiwu ZHANG , Jianlong ZHANG , Yanling MA , Jie LI , Zixian FENG , Jiahui LIU . Synthesis of visual fluorescence emission CdSe nanocrystals based on ligand regulation. Chinese Journal of Inorganic Chemistry, 2025, 41(2): 308-320. doi: 10.11862/CJIC.20240138
12. [12]
  Fang Niu , Rong Li , Qiaolan Zhang . Analysis of Gas-Solid Adsorption Behavior in Resistive Gas Sensing Process. University Chemistry, 2024, 39(8): 142-148. doi: 10.3866/PKU.DXHX202311102
13. [13]
  Lutian Zhao , Yangge Guo , Liuxuan Luo , Xiaohui Yan , Shuiyun Shen , Junliang Zhang . Electrochemical Synthesis for Metallic Nanocrystal Electrocatalysts: Principle, Application and Challenge. Acta Physico-Chimica Sinica, 2024, 40(7): 2306029-0. doi: 10.3866/PKU.WHXB202306029
14. [14]
  Ruming Yuan , Pingping Wu , Laiying Zhang , Xiaoming Xu , Gang Fu . Patriotic Devotion, Upholding Integrity and Innovation, Wholeheartedly Nurturing the New: The Ideological and Political Design of the Experiment on Determining the Thermodynamic Functions of Chemical Reactions by Electromotive Force Method. University Chemistry, 2024, 39(4): 125-132. doi: 10.3866/PKU.DXHX202311057
15. [15]
  Da Wang , Xiaobin Yin , Jianfang Wu , Yaqiao Luo , Siqi Shi . All-Solid-State Lithium Cathode/Electrolyte Interfacial Resistance: From Space-Charge Layer Model to Characterization and Simulation. Acta Physico-Chimica Sinica, 2024, 40(7): 2307029-0. doi: 10.3866/PKU.WHXB202307029
16. [16]
  Haiyu Zhu , Zhuoqun Wen , Wen Xiong , Xingzhan Wei , Zhi Wang . 二维半金属/硅异质结中肖特基势垒高度的准确高效预测. Acta Physico-Chimica Sinica, 2025, 41(7): 100078-0. doi: 10.1016/j.actphy.2025.100078
17. [17]
  Jianyin He , Liuyun Chen , Xinling Xie , Zuzeng Qin , Hongbing Ji , Tongming Su . Construction of ZnCoP/CdLa₂S₄ Schottky Heterojunctions for Enhancing Photocatalytic Hydrogen Evolution. Acta Physico-Chimica Sinica, 2024, 40(11): 2404030-0. doi: 10.3866/PKU.WHXB202404030
18. [18]
  Jia Huo , Jia Li , Yongjun Li , Yuzhi Wang . Ideological and Political Design of Physical Chemistry Teaching: Chemical Potential of Any Component in an Ideal-Dilute Solution. University Chemistry, 2024, 39(2): 14-20. doi: 10.3866/PKU.DXHX202307075
19. [19]
  Min WANG , Dehua XIN , Yaning SHI , Wenyao ZHU , Yuanqun ZHANG , Wei ZHANG . Construction and full-spectrum catalytic performance of multilevel Ag/Bi/nitrogen vacancy g-C₃N₄/Ti₃C₂T_x Schottky junction. Chinese Journal of Inorganic Chemistry, 2024, 40(6): 1123-1134. doi: 10.11862/CJIC.20230477
20. [20]
  Peiyu Zhang , Aixin Song , Jingcheng Hao , Jiwei Cui . 高频超声法制备聚多巴胺薄膜综合实验. University Chemistry, 2025, 40(6): 210-214. doi: 10.12461/PKU.DXHX202407081

Get Citation

PDF

XML

Metrics

PDF Downloads(0)
Abstract views(556)
HTML views(118)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142