Citation: XIAO Lixin, DUAN Laiqiang, CHAI Junyi, WANG Yun, CHEN Zhijian, QU Bo, NG Qihuang. Fabrication of Large Area of Anodic Aluminum Oxide Ultrathin Film Directly onto an ITO Electrode with a Ti Buffer Layer[J]. Acta Physico-Chimica Sinica, ;2011, 27(03): 749-753. doi: 10.3866/PKU.WHXB20110310 shu

Fabrication of Large Area of Anodic Aluminum Oxide Ultrathin Film Directly onto an ITO Electrode with a Ti Buffer Layer

1.
State Key Laboratory for Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, P. R. China

Received Date: 12 October 2010
Available Online: 27 January 2011
Fund Project: 国家基础科学人才培养基金(J0630311) (J0630311) 国家自然科学基金(10934001, 60907015, 10821062) (10934001, 60907015, 10821062)国家重点基础研究发展规划项目(973) (2007CB307000, 2009CB930504)资助 (973) (2007CB307000, 2009CB930504)

An anodic aluminum oxide (AAO) ultrathin film (~140 nm, about half the thickness of the original Al film) was successfully fabricated directly onto an indium tin oxide (ITO) electrode without the erosion of ITO by a two-step anodization process in 0.3 mol·L^-1 O₂SO₄ solution at a constant voltage of 20 V. Here, a thin titanium buffer layer was included between the ITO electrode and the Al film by radio frequency (RF) magnetron sputtering. A large area (about 4 cm²) of porous alumina with nanoscaled channels perpendicular to the substrates was obtained. The average pore diameter and the pore interspace were approximately 30 and 60 nm, respectively. We found that the Ti buffer layer with a thickness of 10-40 nm between the Al layer and the ITO substrate played a critical role in improving the adhesion and ensuring ITO protection, which could not be duplicated by other metals, e.g., Cr, Au, Ag, and Cu. UV-visible transmittance spectra confirmed that the Ti buffer layer was oxidized and became transparent TiO₂ and that 10-20 nm of the Ti buffer layer together with the two-step anodization process is suitable for high transparency. Therefore, the AAO specimen possessing a high nanoscale regularity and transparency may have potential use in photonics, photovoltaics, and nanofabrications.
- Anodic aluminum oxide,
- Ultrathin film,
- ITO transparent electrode,
- Titanium buffer layer,
- Radio frequency magnetron sputtering
1. [1]
  
  (1) Masuda, H.; Fukuda, K. Science 1995, 268, 1466.
2. [2]
  (2) Masuda, H.; Hasegwa, F.; Ono, S. J. Electrochem. Soc. 1997, 144, L127.
3. [3]
  (3) Guo, Y. Y.; Wang, M.; Mao, X. B.; Jiang, Y. X.; Wang, C.; Yang, Y. L. Acta Phys. -Chim. Sin. 2010, 26, 203.
4. [4]
  [郭元元, 汪明, 毛晓波, 蒋月秀, 王琛, 杨延莲. 物理化学学报, 2010, 26, 203.]
5. [5]
  (4) Yanagishita, T.; Sasaki, M.; Nishio, K.; Masuda, H. Adv. Mater. 2004, 16, 429.
6. [6]
  (5) Johansson, A.; Widenkvist, E.; Lu, J.; Boman, M.; Jansson, U. Nano Lett. 2005, 5, 1603.
7. [7]
  (6) Shukla, S.; Kim, K. T.; Baev, A.; Yoon, Y. K.; Litchinitser, N. M.; Prasad, P. N. Nano Lett. 2010, 4, 2249.
8. [8]
  (7) Li, A. P.; Müller, F.; Birner, A.; Nielsch, K.; Gösele, U. J. Appl. Phys. 1998, 84, 6023.
9. [9]
  (8) Lee, W.; Ji, R.; Gösele, U.; Nielsch, K. Nat. Mater. 2006, 5, 741.
10. [10]
  (9) Shirota, Y.; Kageyama, H. Chem. Rev. 2007, 107, 953.
11. [11]
  (10) Xia, Y. N.; Yang, P. D.; Sun, Y. G.; Wu, Y. Y.; Mayers, B.; Gates, B.; Yin, Y. D.; Kim, F.; Yan, Y. Q. Adv. Mater. 2003, 15, 353.
12. [12]
  (11) Hobbs, K. L.; Larson, P. R.; Lian, G. D.; Keay J. C.; Johnson, M. B. Nano Lett. 2004, 4, 167.
13. [13]
  (12) Sander, M. S.; Tan, L. S. Adv. Funct. Mater. 2003, 13, 393.
14. [14]
  (13) Tian, M. L.; Xu, S. Y.; Wang, J. G.; Kumar, N.; Wertz, E.; Li, Q.; Campbell, P. M.; Chan, M. H. W.; Mallouk, T. E. Nano Lett. 2005, 5, 697.
15. [15]
  (14) Teh, L. K.; Furin, V.; Martucci, A.; Guglielmi, M.; Wong, C. C.; Romanato, F. Thin Solid Films 2007, 515, 5787.
16. [16]
  (15) Chuang, L. M.; Fu, H. K.; Chen, Y. F. Appl. Phys. Lett. 2005, 86, 061902.
17. [17]
  (16) Chu, S. Z.; Wada, K.; Inoue, S.; Todoroki, S. J. Electrochem. Soc. 2002, 149, B321.
18. [18]
  (17) Chu, S. Z.; Wada, K.; Inoue, S.; Hishita, S.; Kurashima, K. J. Phys. Chem. B 2003, 107, 10180.
19. [19]
  (18) Musselman, K. P.; Mulholland, G. J.; Robinson, A. P.; Schmidt-Mende, L.; MacManus-Driscoll, J. L. Adv. Mater. 2008, 20, 4470.
20. [20]
  (19) Ren, X.; Gershon, T.; Iza, D. C.; Munoz-Rojas, D.; Musselman, K.; Macmanus-Driscoll, J. L. Nanotechnology 2009, 20, 365604.
21. [21]
  (20) Kuo, C. Y.; Tang, W. C.; Gau, C.; Guo, T. F.; Jeng, D. Z. Appl. Phys. Lett. 2008, 93, 033307.
22. [22]
  (21) Foong, T. R. B.; Sellinger, A.; Hu, X. ACS Nano 2008, 2, 2250.
23. [23]
  (22) Xiao, L. X.; Duan, L. Q.; Luo, F. W.; Chen, Z. J.; ng, Q. H. A Way to Fabricate an AAO Template and the Corresponding Device Directly on a Transparent electrode. CN Patent 200810224414.7, 2008-10-14.
24. [24]
  [肖立新, 段来强, 罗方闻, 陈志坚, 龚旗煌. 在透明电极上制作AAO模板的方法及相应器件: 中国, CN200810224414.7
25. [25]
  [P]. 2008-10-14.]
26. [26]
  (23) Masuda, H.; Yada, K.; Osaka, A. Jpn. J. Appl. Phys. 1998, 37, L1340.
27. [27]
  (24) Li, A. P.; Müller, F.; Birner, A.; Nielsch, K.; Gösele, U. Adv. Mater. 1999, 11, 483.
28. [28]
  (25) Tang, Y. X.; Tao, J.; Zhang, Y. Y.; Wu, T.; Tao, H. J.; Bao, Z. G. Acta Phys. -Chim. Sin. 2008, 24, 2191.
29. [29]
  [汤育欣, 陶杰, 张焱焱, 吴涛, 陶海军, 包祖国. 物理化学学报, 2008, 24, 2191.]
1. [1]
  Peiyu Zhang , Aixin Song , Jingcheng Hao , Jiwei Cui . 高频超声法制备聚多巴胺薄膜综合实验. University Chemistry, 2025, 40(6): 210-214. doi: 10.12461/PKU.DXHX202407081
2. [2]
  Wendian XIE , Yuehua LONG , Jianyang XIE , Liqun XING , Shixiong SHE , Yan YANG , Zhihao HUANG . Preparation and ion separation performance of oligoether chains enriched covalent organic framework membrane. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1528-1536. doi: 10.11862/CJIC.20240050
3. [3]
  Jiaxin Su , Jiaqi Zhang , Shuming Chai , Yankun Wang , Sibo Wang , Yuanxing Fang . Optimizing Poly(heptazine imide) Photoanodes Using Binary Molten Salt Synthesis for Water Oxidation Reaction. Acta Physico-Chimica Sinica, 2024, 40(12): 2408012-0. doi: 10.3866/PKU.WHXB202408012
4. [4]
  Lisha LEI , Wei YONG , Yiting CHENG , Yibo WANG , Wenchao HUANG , Junhuan ZHAO , Zhongjie ZHAI , Yangbin DING . Application of regenerated cellulose and reduced graphene oxide film in synergistic power generation from moisture electricity generation and Mg-air batteries. Chinese Journal of Inorganic Chemistry, 2025, 41(6): 1151-1161. doi: 10.11862/CJIC.20240202
5. [5]
  Bo YANG , Gongxuan LÜ , Jiantai MA . Corrosion inhibition of nickel-cobalt-phosphide in water by coating TiO₂ layer. Chinese Journal of Inorganic Chemistry, 2025, 41(2): 365-384. doi: 10.11862/CJIC.20240063
6. [6]
  Xinyuan Shi , Chenyangjiang , Changyu Zhai , Xuemei Lu , Jia Li , Zhu Mao . Preparation and Photoelectric Performance Characterization of Perovskite CsPbBr₃ Thin Films. University Chemistry, 2024, 39(6): 383-389. doi: 10.3866/PKU.DXHX202312019
7. [7]
  Shanghua Li , Malin Li , Xiwen Chi , Xin Yin , Zhaodi Luo , Jihong Yu . High-Stable Aqueous Zinc Metal Anodes Enabled by an Oriented ZnQ Zeolite Protective Layer with Facile Ion Migration Kinetics. Acta Physico-Chimica Sinica, 2025, 41(1): 100003-0. doi: 10.3866/PKU.WHXB202309003
8. [8]
  Hongyun Liu , Jiarun Li , Xinyi Li , Zhe Liu , Jiaxuan Li , Cong Xiao . Course Ideological and Political Design of a Comprehensive Chemistry Experiment: Constructing a Visual Molecular Logic System Based on Intelligent Hydrogel Film Electrodes. University Chemistry, 2024, 39(2): 227-233. doi: 10.3866/PKU.DXHX202309070
9. [9]
  Xuechen Hu , Qiuying Xia , Fan Yue , Xinyi He , Zhenghao Mei , Jinshi Wang , Hui Xia , Xiaodong Huang . Electrochemical Characteristics of LiNbO₃ Anode Film and Its Applications in All-Solid-State Thin-Film Lithium-Ion Battery. Acta Physico-Chimica Sinica, 2024, 40(2): 2309046-0. doi: 10.3866/PKU.WHXB202309046
10. [10]
  Tong Zhou , Jun Li , Zitian Wen , Yitian Chen , Hailing Li , Zhonghong Gao , Wenyun Wang , Fang Liu , Qing Feng , Zhen Li , Jinyi Yang , Min Liu , Wei Qi . Experiment Improvement of “Redox Reaction and Electrode Potential” Based on the New Medical Concept. University Chemistry, 2024, 39(8): 276-281. doi: 10.3866/PKU.DXHX202401005
11. [11]
  Ji-Quan Liu , Huilin Guo , Ying Yang , Xiaohui Guo . Calculation and Discussion of Electrode Potentials in Redox Reactions of Water. University Chemistry, 2024, 39(8): 351-358. doi: 10.3866/PKU.DXHX202401031
12. [12]
  Meiran Li , Yingjie Song , Xin Wan , Yang Li , Yiqi Luo , Yeheng He , Bowen Xia , Hua Zhou , Mingfei Shao . Nickel-Vanadium Layered Double Hydroxides for Efficient and Scalable Electrooxidation of 5-Hydroxymethylfurfural Coupled with Hydrogen Generation. Acta Physico-Chimica Sinica, 2024, 40(9): 2306007-0. doi: 10.3866/PKU.WHXB202306007
13. [13]
  Shengjuan Huo , Xiaoyan Zhang , Xiangheng Li , Xiangning Li , Tianfang Chen , Yuting Shen . Unveiling the Marvels of Titanium: Popularizing Multifunctional Colored Titanium Product Films. University Chemistry, 2024, 39(5): 184-192. doi: 10.3866/PKU.DXHX202310127
14. [14]
  Xiaomei Ning , Liang Zhan , Xiaosong Zhou , Jin Luo , Xunfu Zhou , Cuifen Luo . Preparation and Electro-Oxidation Performance of PtBi Supported on Carbon Cloth: A Recommended Comprehensive Chemical Experiment. University Chemistry, 2024, 39(11): 217-224. doi: 10.3866/PKU.DXHX202401085
15. [15]
  Qianwen Han , Tenglong Zhu , Qiuqiu Lü , Mahong Yu , Qin Zhong . Performance and Electrochemical Asymmetry Optimization of Hydrogen Electrode Supported Reversible Solid Oxide Cell. Acta Physico-Chimica Sinica, 2025, 41(1): 100005-0. doi: 10.3866/PKU.WHXB202309037
16. [16]
  Wang Wang , Yucheng Liu , Shengli Chen . Use of NiFe Layered Double Hydroxide as Electrocatalyst in Oxygen Evolution Reaction: Catalytic Mechanisms, Electrode Design, and Durability. Acta Physico-Chimica Sinica, 2024, 40(2): 2303059-0. doi: 10.3866/PKU.WHXB202303059
17. [17]
  Ke Li , Chuang Liu , Jingping Li , Guohong Wang , Kai Wang . Architecting Inorganic/Organic S-Scheme Heterojunction of Bi₄Ti₃O₁₂ Coupling with g-C₃N₄ for Photocatalytic H₂O₂ Production from Pure Water. Acta Physico-Chimica Sinica, 2024, 40(11): 2403009-0. doi: 10.3866/PKU.WHXB202403009
18. [18]
  Bao Jia , Yunzhe Ke , Shiyue Sun , Dongxue Yu , Ying Liu , Shuaishuai Ding . Innovative Experimental Teaching for the Preparation and Modification of Conductive Organic Polymer Thin Films in Undergraduate Courses. University Chemistry, 2024, 39(10): 271-282. doi: 10.12461/PKU.DXHX202404121
19. [19]
  Ronghui LI . Photocatalysis performance of nitrogen-doped CeO₂ thin films via ion beam-assisted deposition. Chinese Journal of Inorganic Chemistry, 2025, 41(6): 1123-1130. doi: 10.11862/CJIC.20240440
20. [20]
  Yuting Bai , Cenqi Yan , Zhen Li , Jiaqiang Qin , Pei Cheng . Preparation of High-Strength Polyimide Porous Films with Thermally Closed Pore Property by In Situ Pore Formation Method. Acta Physico-Chimica Sinica, 2024, 40(9): 2306010-0. doi: 10.3866/PKU.WHXB202306010

Get Citation

PDF

XML

Metrics

PDF Downloads(1472)
Abstract views(3689)
HTML views(35)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142