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Citation: Lu Ping-He, Li Yu-Lin, Zhang Kang-Zang, Jin Zhong-Kao, Qin Qi-Zong. SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl₂-Ta SURFACE-REACTIONS[J]. Acta Physico-Chimica Sinica, ;1990, 6(06): 654-659. doi: 10.3866/PKU.WHXB19900605 shu

SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl₂-Ta SURFACE-REACTIONS

1.
Laser Chemistry Laboratory; Fudan University; Shanghai

Received Date: 24 May 1989
Available Online: 15 December 1990

The supersonic molecular beam technique is used to study the dynamics of laser-induced surface reactions of Ta surface with chlorine at three different wavelengths (355, 560, 1064 nm). The mass and velocity distributions of the reaction products are determined by the time-resolved mass spectrometry. The observed time-of-flight(TOF) spectra of the products show that the main products are TaCl, TaCl_2, TaCl_3 and TaCl_4 and there is no TaCl_5 observed. Their TOF spectra can be fitted with Maxwell-Boltz-mann distributions at translational temperatures in the range of 500-1500 K. The effect of translational energy of incident Cl_2 molecules and laser fluences on the laserinduced Cl_2-Ta surface reactions at different wavelengths are presented. Finally, the possible reaction mechanism is discussed based on the experimental observations.
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SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl2-Ta SURFACE-REACTIONS

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SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl₂-Ta SURFACE-REACTIONS