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Citation: ZHANG Guang-Ping, LI Chao, MA Wei, WU Shang-Quan, ZHANG Qing-Chuan. A Cantilever Array Sensor Platform Guided by Optical Fibers and Its Sensing Application[J]. Chinese Journal of Analytical Chemistry, ;2017, 45(1): 42-47. doi: 10.11895/j.issn.0253-3820.160629 shu

A Cantilever Array Sensor Platform Guided by Optical Fibers and Its Sensing Application

1.
Chinese Academy Sciences Key Laboratory of Mechanical Behavior and Design of Materials, Department of Modern Mechanics, University of Science and Technology of China, Hefei 230027, China;
2.
MiOMi Microsystems Company Ltd., Hong Kong 999077, China

Received Date: 24 August 2016
Revised Date: 22 November 2016

Fund Project: This work was supported by the National Natural Science Foundation of China (Nos.11627803,11502265,11472266) and the Strategic Priority Research Program of the Chinese Academy of Sciences (No.XDB22040502)

A cantilever array sensor platform has been developed based on the optical lever method, the cantilever array chip is also fabricated to introduce its applications on biochemical detection. Optical fibers coupled to lasers are used as the scanning light source. This sensor system has good stability, and the noise of the detection signal is about 2 nm. Meanwhile, the cantilevers of the fabricated chip have good straightness and are consistent to temperature response, and the deviations of response sensitivity of cantilevers caused by temperature change are no more than 5.0%. This sensing system is used to detect Hg²⁺ in aqueous solution with a concentration range of 1-200 ng/mL. The deflections of one array chip are close in the same concentration, and the average deviation is less than 15%. Samples at the concentration levels of 1 ng/mL and 0.2 ng/mL are detected separately by the fabricated chip and a foreign commercial chip on the sensor platform. The result shows that it's difficult for the fabricated chip to achieve a higher detection sensitivity and necessary to improve the cantilever array production process.
- Biochemical sensor,
- Optical fiber,
- Cantilever array,
- Mercury,
- Quantitative detection
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