Citation: LU Xiao-Bin, XIAO Shou-Jun. Sensitive and Accurate Measurement of Interstitial Oxygen and Substitutional Carbon in Single Crystalline Silicon by Multiple Transmission-Reflection Infrared Spectroscopy (MTR-IR)[J]. Chinese Journal of Inorganic Chemistry, ;2016, 32(2): 351-359. doi: 10.11862/CJIC.2016.044 shu

Sensitive and Accurate Measurement of Interstitial Oxygen and Substitutional Carbon in Single Crystalline Silicon by Multiple Transmission-Reflection Infrared Spectroscopy (MTR-IR)

LU Xiao-Bin ,
XIAO Shou-Jun ^*,,

State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, China

Corresponding author: XIAO Shou-Jun, sjxiao@nju.edu.cn
Received Date: 3 November 2015
Revised Date: 3 December 2015

Figures(9)

A new infrared spectroscopic measurement of interstitial oxygen and substitutional carbon in silicon wafers at room temperature by Multiple Transmission-Reflection Infrared Spectroscopy (MTR-IR) has been established. The superiority of MTR-IR to conventional IR has been analyzed first in principle by theoretical calculation and then verified by practical measurements of single crystalline silicon samples. The advantages of MTR-IR over conventional IR with a single normal incidence are: (1) The absorption bands of interstitial oxygen at 1 107 cm^-1 and substitutional carbon at 605 cm^-1 can be enhanced linearly with the simplified transmission times (N) between 6 and 12, which consequently extends the detection limit of oxygen and carbon at least one order of magnitude lower. (2) The strength of interference fringes can be decreased for a 0.2 mm thin silicon slice by 23 times as that from the single normal incidence and 11 times as that from the Brewster angle transmission respectively. (3) Not like the conventional IR method, only collecting data from one sampling point at each measurement, MTR-IR collects data from multiple sampling points in a longer sample for one measurement. Overall, both theoretical calculations and experimental results demonstrate the high sensitivity, reliability, and reproducibility of the MTR-IR spectroscopy on the measurement of impurities of interstitial oxygen and substitutional carbon of single crystalline silicon.
- multiple transmission-reflection (MTR),
- infrared Spectroscopy (IR),
- interstitial oxygen,
- substitutional carbon
1. [1]
  Boyle R. Thermo Scientific Application Note, 2008, 50640:1-4
2. [2]
  Craven R A, Korb H W. Solid State Technol., 1981, 24(7):55-61
3. [3]
  Benson K E, Lin W, Martin E P. Semiconductor Silicon 1981. Pennington N.J.: Electrochem. Soc. Inc., 1981:33-48
4. [4]
  Abe T, Kikuchi K, Shirai S, et al. Semiconductor Silicon 1981. Pennington N.J.: Electrochem. Soc. Inc., 1981:54-71
5. [5]
  Rava P, Gatos H C, Lagowski J. Semiconductor Silicon 1981. Pennington N.J.: Electrochem. Soc. Inc., 1981:232-243
6. [6]
  Ohsawa A, Honda K, Yoshikawa M. Fujitsu Scie. Techn. J., 1980, 16(3):123-134
7. [7]
  Kishino S, Matsushita Y, Kanamori M. Appl. Phys. Lett., 1979, 35(3):213-215 doi: 10.1063/1.91098
8. [8]
  Ogino M. Appl. Phys. Lett., 1982, 41(9):847-849 doi: 10.1063/1.93715
9. [9]
  Oehrlein G S, Lindstrom J L, Corbett J W. Appl. Phys. Lett., 1982, 40(3):241-243 doi: 10.1063/1.93060
10. [10]
  Ohsawa A, Takizawa R, Honda K, et al. Appl. Phys., 1982, 53(8):5733-5737 doi: 10.1063/1.331461
11. [11]
  Pajot B. Analusis., 1977, 5:293-303
12. [12]
  Hrostowski H J A B J. J. Chem. Phys., 1960, 33:980-990 doi: 10.1063/1.1731397
13. [13]
  Corbett J W, Mcdonald R S, Watkins G D. J. Phys. Chem. Solids, 1964, 25:873-879 doi: 10.1016/0022-3697(64)90100-3
14. [14]
  Kaiser W, Keck P H, Lange C F. Phys. Rev., 1956, 101(4): 1264-1267 doi: 10.1103/PhysRev.101.1264
15. [15]
  Kaiser W, Keck P H. J. Appl. Phys., 1957, 28(8):882-885 doi: 10.1063/1.1722880
16. [16]
  Kaiser W, Frisch H L, Reiss H. Phys. Rev., 1958, 112(5): 1546-1554 doi: 10.1103/PhysRev.112.1546
17. [17]
  Bosomworth D R, Hayes W, Spray A R L, et al. Royal Soc. London, 1970, 317(1528):133-152 doi: 10.1098/rspa.1970.0107
18. [18]
  Pajot B, Deltour J P. Infrared Phys., 1967, 7:195-200 doi: 10.1016/0020-0891(67)90018-8
19. [19]
  Oeder R, Wagner P. Defects in Semiconductors Ⅱ. N.Y.: North-Holland, 1983:171-175
20. [20]
  Kolbesen B O, Kladenovi T. Krist. Tech., 1980, 15(1):k1-k3 doi: 10.1002/(ISSN)1521-4079
21. [21]
  ASTM. Designation F1188: Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption.
22. [22]
  ASTM. Designation F1391: Test Method for Substitutional Atomic Carbon Content by Infrared Absorption.
23. [23]
  Liu H, Xiao S, Chen Y, et al. J. Phys. Chem. B, 2006, 110 (36):17702-17705 doi: 10.1021/jp063467q
24. [24]
  Guo P, Liu H, Liu X, et al. J. Phys. Chem. C, 2010, 114(1): 333-341 doi: 10.1021/jp909027e
25. [25]
  Liu H, Venkataraman N V, Bauert T E, et al. J. Phys. Chem. A, 2008, 112(48):12372-12377 doi: 10.1021/jp804553x
26. [26]
  Liu H, Venkataraman N V, Spencer N D, et al. Chemphyschem, 2008, 9(14):1979-1981 doi: 10.1002/cphc.v9:14
27. [27]
  LIU Hong-Bo (刘洪波). Thesis for the Doctorate of Nanjing University(南京大学博士论文). 2008.
28. [28]
  Xiao S, Liu H, Tobias B. China Patent, 2006, 10097859.4. 2006-11-16.
29. [29]
  Leroueille J. Appl. Spectrosc., 1982, 36(2):153-155 doi: 10.1366/0003702824638890
30. [30]
  Baghdadi A, Bullis W M, Croarkin M C, et al. J. Electrochem. Soc., 1989, 136(7):2015-2024 doi: 10.1149/1.2097135
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