Citation: Qing-Bin Jiao, Xin Tan, Ji-Wei Zhu, Jian-Xiang Gao. The effects of ultrasound frequency and power on the activation energy in Si-KOH reaction system[J]. Chinese Chemical Letters, ;2014, 25(4): 617-620. doi: 10.1016/j.cclet.2013.12.012 shu

The effects of ultrasound frequency and power on the activation energy in Si-KOH reaction system

Qing-Bin Jiao ^a,b ,
^a,, ,
Xin Tan ^a ,
Ji-Wei Zhu ^a ,
Jian-Xiang Gao ^a

1.
a Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
b University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: ,
Received Date: 17 September 2013
Available Online: 6 December 2013
Fund Project:

The activation energy is the minimum amount of energy required to initiate a reaction. It is one of the important indexes for appraising a reaction. The chemical reaction rate is closely related to the value of activation energy, and reducing activation energy is propitious to promoting a chemical reaction. In the present paper, the relationship between the activation energy in Si-KOH reaction system and the ultrasound frequency and power has been discussed for the first time. The range of ultrasound frequency and power is 40-100 kHz (interval by 20 kHz) and 10-50W (interval by 10 W), respectively. The experimental data indicate that the activation energy decreases with the increasing ultrasound power. Comparing with the activation energy without ultrasound irradiation, the results in our paper indicate that ultrasound irradiation could reduce the activation energy in Si-KOH reaction system and increase the reaction rate.
- Si-KOH,
- Etching rate,
- Ultrasonic irradiation,
- Activation energy
1. [1]
  [1] C.S. Zhou, H. Ma, Ultrasonic degradation of polysaccharide from a red algae (Porphyra yezoensis), J. Agric. Food Chem. 54 (2006) 2223-2228.
2. [2]
  [2] H.M. Moghaddam, S. Nasirian, Decreasing of the activation energy of TiO₂ nanoparticles by applying ultrasound waves using the sol-gel method, Iran. J. Phys. Res. 11 (2012) 411-416.
3. [3]
  [3] S.U. Rege, R.T. Yang, C.A. Cain, Desorption by ultrasound: phenol on activated carbon and polymeric resin, AIChE J. 44 (1998) 1519-1528.
4. [4]
  [4] E.X. Leaes, D. Lima, L. Miklasevicius, et al., Effect of ultrasound-assisted irradiation on the activities of a-amylase and amyloglucosidase, Biocatal. Agric. Biotechnol. 2 (2013) 21-25.
5. [5]
  [5] M. Souza, E.T. Mezadri, E. Zimmerman, et al., Evaluation of activity of a commercial amylase under ultrasound-assisted, Ultrason. Sonochem. 20 (2013) 89-94.
6. [6]
  [6] M.A. Behnajady, N. Modirshahla, M. Shokri, B. Vahid, Investigation of the effect of ultrasonic waves on the enhancement of efficiency of direct photolysis and photooxidation processes on the removal of a model contaminant from textile industry, Global NEST J. 10 (2008) 8-15.
7. [7]
  [7] M.R. Wang, L. Jiang, S.F. Zhou, Z.Y. Zhang, Z.C. Ji, Ultrasound-assisted synthesis and preliminary bioactivity of novel 2H-1,2,4-thiadiazolo [2,3] pyrimidine derivatives containing fluorine, Chin. Chem. Lett. 23 (2012) 561-564.
8. [8]
  [8] M.R.P. Heravi, An efficient fluorination of b-ketosulfones promoted by a room temperature ionic liquid at ambient conditions under ultrasound irradiation using SelectfluorTM F-TEDA-BF4, Chin. Chem. Lett. 21 (2010) 1399-1402.
9. [9]
  [9] C.L. Pieck, R.J. Verderone, E.L. Jablonski, J.M. Parena, Burning of coke on Pt Re/Al2O3 catalyst: activation energy and oxygen reaction order, Appl. Catal. 55 (1989) 1-10.
10. [10]
  [10] W.T. Tsang, S. Wang, Preferentially etched diffraction gratings in silicon, J. Appl. Phys. 46 (1975) 2163-2166.
11. [11]
  [11] J. Sarathy, D.C. Diaz, J.C. Campbell, Crystallographically limited submicrometer gratings in (1 0 0) and (2 1 1) silicon, Opt. Lett. 20 (1995) 1216-1218.
12. [12]
  [12] C.H. Chang, R.K. Heilmann, R.C. Fleming, et al., Fabrication of sawtooth diffraction gratings using nanoimprint lithography, J. Vac. Sci. Technol. 21 (2003) 2755- 2759.
13. [13]
  [13] M.P. Kowalski, R.K. Heilmann, M.L. Schattenburg, et al., Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating, Appl. Opt. 45 (2006) 1676-1679.
14. [14]
  [14] U.U. Graf, D.T. Jaffe, E.J. Kim, et al., Fabrication and evaluation of an etched infrared diffraction grating, Appl. Opt. 33 (1994) 96-102.
15. [15]
  [15] L.D. Keller, D.T. Jaffe, O.A. Ershov, B. Thomas, U.U. Graf, Fabrication and testing of chemically micromachined silicon echelle gratings, Appl. Opt. 39 (2000) 1094- 1105.
16. [16]
  [16] J.P. Marsh, D.J. Mar, D.T. Jaffe, Production and evaluation of silicon immersion gratings for infrared astronomy, Appl. Opt. 46 (2007) 3400-3416.
17. [17]
  [17] H. Seidel, L. Csepregi, A. Heuberger, H. Baumgartel, Anisotropic etching of crystalline silicon in alkaline solutions. I. Orientation dependence and behavior of passivation layers, J. Electrochem. Soc. 137 (1990) 3612-3626.
18. [18]
  [18] E. Herr, H. Baltes, KOH etching of high-index crystal planes in silicon, Sens. Actuators A: Phys. 31 (1992) 283-287.
19. [19]
  [19] P.M. Zavrocky, T. Earles, N.L. Pokrovskiy, J.A. Green, B.E. Burns, Fabrication of vertical sidewalls by anisotropic etching of silicon (1 0 0) wafers, J. Electrochem. Soc. 141 (1994) 3182-3188.
20. [20]
  [20] J.B. Price, Anisotropic etching of silicon with KOH-H₂O-isopropyl alcohol, in: H.R. Huff, R.R. Burgess (Eds.), Semiconductor Silicon, Electrochemical Society, Pennington, 1973, p. 339.
21. [21]
  [21] K. Ohwada, Y. Negoro, Y. Konaka, T. Oguchi, Groove depth uniformization in[1 1 0] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication, in: Proceedings of the IEEE Micro Electro Mechanical Systems, Amsterdam, Netherlands, IEEE, 1995, pp. 100-105.
22. [22]
  [22] T. Baum, D.J. Schiffrin, AFM study of surface finish improvement by ultrasound in the anisotropic etching of Si(1 0 0) in KOH for micromachining application, J. Micromech. Microeng. 7 (1997) 338-342.
23. [23]
  [23] J. Chen, L.T. Lin, Z.J. Li, et al., Study of anisotropic etching of (1 0 0) Si with ultrasonic agitation, Sens. Actuators A 96 (2002) 152-156.
24. [24]
  [24] C.R. Yang, P.Y. Chen, Y.C. Chion, R.T. Lee, Effects of mechanical agitation and surfactant additive on silicon anisotropic etching in alkaline KOH solution, Sens. Actuators A 119 (2005) 263-270.
25. [25]
  [25] Q.B. Jiao, Bayanheshig, X. Tan, J.W. Zhu, Numerical simulation of ultrasonic enhancement on mass transfer in liquid-solid reaction by a new computational model, Ultrason. Sonochem. 21 (2014) 535-541.
26. [26]
  [26] R.L. Bristol, J.A. Britten, R. Hemphill, P. Jelinsky, M. Hurwitz, Silicon diffraction gratings for use in the far and extreme-ultraviolet, Proc. SPIE 3114 (1997) 580- 585.
27. [27]
  [27] J. Peng, C. Chao, J.Y. Dai, H.L.W. Chan, H.S. Luo, Micro-patterning of 0.70Pb (Mg_1/3Nb_2/3)O₃-0.30PbTiO₃ single crystals by ultrasonic wet chemical etching, Mater. Lett. 62 (2008) 3127-3130.
1. [1]
  Xin Li , Ling Zhang , Yunyan Fan , Shaojing Lin , Yong Lin , Yongsheng Ying , Meijiao Hu , Haiying Gao , Xianri Xu , Zhongbiao Xia , Xinchuan Lin , Junjie Lu , Xiang Han . Carbon interconnected microsized Si film toward high energy room temperature solid-state lithium-ion batteries. Chinese Chemical Letters, 2025, 36(2): 109776-. doi: 10.1016/j.cclet.2024.109776
2. [2]
  Min Huang , Ru Cheng , Shuai Wen , Liangtong Li , Jie Gao , Xiaohui Zhao , Chunmei Li , Hongyan Zou , Jian Wang . Ultrasensitive detection of microRNA-21 in human serum based on the confinement effect enhanced chemical etching of gold nanorods. Chinese Chemical Letters, 2024, 35(9): 109379-. doi: 10.1016/j.cclet.2023.109379
3. [3]
  Lian Sun , Honglei Wang , Ming Ma , Tingting Cao , Leilei Zhang , Xingui Zhou . Shape and composition evolution of Pt and Pt₃M nanocrystals under HCl chemical etching. Chinese Chemical Letters, 2024, 35(9): 109188-. doi: 10.1016/j.cclet.2023.109188
4. [4]
  Tingting Liu , Pengfei Sun , Wei Zhao , Yingshuang Li , Lujun Cheng , Jiahai Fan , Xiaohui Bi , Xiaoping Dong . Magnesium doping to improve the light to heat conversion of OMS-2 for formaldehyde oxidation under visible light irradiation. Chinese Chemical Letters, 2024, 35(4): 108813-. doi: 10.1016/j.cclet.2023.108813
5. [5]
  Yan-Kai Zhang , Yong-Zheng Zhang , Chun-Xiao Jia , Fang Wang , Xiuling Zhang , Yuhang Wu , Zhongmin Liu , Hui Hu , Da-Shuai Zhang , Longlong Geng , Jing Xu , Hongliang Huang . A stable Zn-MOF with anthracene-based linker for Cr(VI) photocatalytic reduction under sunlight irradiation. Chinese Chemical Letters, 2024, 35(12): 109756-. doi: 10.1016/j.cclet.2024.109756
6. [6]
  Qian Wu , Mengda Xu , Tianjiao Ma , Shuzhen Yan , Jin Li , Xuesong Jiang . Chalcone-derived oxime esters with efficient photoinitiation properties under LED irradiation. Chinese Chemical Letters, 2025, 36(3): 110427-. doi: 10.1016/j.cclet.2024.110427
7. [7]
  Sixiao Liu , Tianyi Wang , Lei Zhang , Chengyin Wang , Huan Pang . Cerium-based metal-organic framework-modified natural mineral vermiculite for photocatalytic nitrogen fixation under visible-light irradiation. Chinese Chemical Letters, 2025, 36(3): 110058-. doi: 10.1016/j.cclet.2024.110058
8. [8]
  Long Li , Kang Yang , Chenpeng Xi , Mengchao Li , Borong Li , Gui Xu , Yuanbin Xiao , Xiancai Cui , Zhiliang Liu , Lingyun Li , Yan Yu , Chengkai Yang . Highly-chlorinated inert and robust interphase without mineralization of oxide enhancing high-rate Li metal batteries. Chinese Chemical Letters, 2024, 35(6): 108814-. doi: 10.1016/j.cclet.2023.108814
9. [9]
  Manyu Zhu , Fei Liang , Lie Wu , Zihao Li , Chen Wang , Shule Liu , Xiue Jiang . Revealing the difference of Stark tuning rate between interface and bulk by surface-enhanced infrared absorption spectroscopy. Chinese Chemical Letters, 2025, 36(2): 109962-. doi: 10.1016/j.cclet.2024.109962
10. [10]
  Zixuan Guo , Xiaoshuai Han , Chunmei Zhang , Shuijian He , Kunming Liu , Jiapeng Hu , Weisen Yang , Shaoju Jian , Shaohua Jiang , Gaigai Duan . Activation of biomass-derived porous carbon for supercapacitors: A review. Chinese Chemical Letters, 2024, 35(7): 109007-. doi: 10.1016/j.cclet.2023.109007
11. [11]
  Zhao Li , Huimin Yang , Wenjing Cheng , Lin Tian . Recent progress of in situ/operando characterization techniques for electrocatalytic energy conversion reaction. Chinese Chemical Letters, 2024, 35(9): 109237-. doi: 10.1016/j.cclet.2023.109237
12. [12]
  Cunjun Li , Wencong Liu , Xianlei Chen , Liang Li , Shenyu Lan , Mingshan Zhu . Adsorption and activation of peroxymonosulfate on BiOCl for carbamazepine degradation: The role of piezoelectric effect. Chinese Chemical Letters, 2024, 35(10): 109652-. doi: 10.1016/j.cclet.2024.109652
13. [13]
  Er-Meng Wang , Ziyi Wang , Xu Ban , Xiaowei Zhao , Yanli Yin , Zhiyong Jiang . Chemoselective photocatalytic sulfenylamination of alkenes with sulfenamides via energy transfer. Chinese Chemical Letters, 2024, 35(12): 109843-. doi: 10.1016/j.cclet.2024.109843
14. [14]
  Yu Yao , Jinqiang Zhang , Yantao Wang , Kunsheng Hu , Yangyang Yang , Zhongshuai Zhu , Shuang Zhong , Huayang Zhang , Shaobin Wang , Xiaoguang Duan . Nitrogen-rich carbon for catalytic activation of peroxymonosulfate towards green synthesis. Chinese Chemical Letters, 2024, 35(11): 109633-. doi: 10.1016/j.cclet.2024.109633
15. [15]
  Guilong Li , Wenbo Ma , Jialing Zhou , Caiqin Wu , Chenling Yao , Huan Zeng , Jian Wang . A composite hydrogel with porous and homogeneous structure for efficient osmotic energy conversion. Chinese Chemical Letters, 2025, 36(2): 110449-. doi: 10.1016/j.cclet.2024.110449
16. [16]
  Bin Feng , Tao Long , Ruotong Li , Yuan-Li Ding . Rationally constructing metallic Sn-ZnO heterostructure via in-situ Mn doping for high-rate Na-ion batteries. Chinese Chemical Letters, 2025, 36(2): 110273-. doi: 10.1016/j.cclet.2024.110273
17. [17]
  Benjian Xin , Rui Wang , Lili Liu , Zhiqiang Niu . Metal-organic framework derived MnO@C/CNTs composite for high-rate lithium-based semi-solid flow batteries. Chinese Journal of Structural Chemistry, 2023, 42(11): 100116-100116. doi: 10.1016/j.cjsc.2023.100116
18. [18]
  Guangchang Yang , Shenglong Yang , Jinlian Yu , Yishun Xie , Chunlei Tan , Feiyan Lai , Qianqian Jin , Hongqiang Wang , Xiaohui Zhang . Regulating local chemical environment in O3-type layered sodium oxides by dual-site Mg²⁺/B³⁺ substitution achieves durable and high-rate cathode. Chinese Chemical Letters, 2024, 35(9): 109722-. doi: 10.1016/j.cclet.2024.109722
19. [19]
  Zizhuo Liang , Fuming Du , Ning Zhao , Xiangxin Guo . Revealing the reason for the unsuccessful fabrication of Li3Zr2Si2PO12 by solid state reaction. Chinese Journal of Structural Chemistry, 2023, 42(11): 100108-100108. doi: 10.1016/j.cjsc.2023.100108
20. [20]
  Yihong Li , Zhong Qiu , Lei Huang , Shenghui Shen , Ping Liu , Haomiao Zhang , Feng Cao , Xinping He , Jun Zhang , Yang Xia , Xinqi Liang , Chen Wang , Wangjun Wan , Yongqi Zhang , Minghua Chen , Wenkui Zhang , Hui Huang , Yongping Gan , Xinhui Xia . Plasma enhanced reduction method for synthesis of reduced graphene oxide fiber/Si anode with improved performance. Chinese Chemical Letters, 2024, 35(11): 109510-. doi: 10.1016/j.cclet.2024.109510

Get Citation

PDF

XML

Metrics

PDF Downloads(0)
Abstract views(639)
HTML views(2)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142