单片集成微型气相色谱芯片研究

引用本文: 田博文, 冯飞, 赵斌, 罗凡, 杨雪蕾, 周海梅, 李昕欣. 单片集成微型气相色谱芯片研究[J]. 分析化学, 2018, 46(9): 1363-1371. doi: 10.11895/j.issn.0253-3820.181027 shu

Citation: TIAN Bo-Wen, FENG Fei, ZHAO Bin, LUO Fan, YANG Xue-Lei, ZHOU Hai-Mei, LI Xin-Xin. Study of Monolithic Integrated Micro Gas Chromatography Chip[J]. Chinese Journal of Analytical Chemistry, 2018, 46(9): 1363-1371. doi: 10.11895/j.issn.0253-3820.181027 shu

单片集成微型气相色谱芯片研究

田博文 ^1,2, ,
冯飞 ^1, ,
赵斌 ^1, ,
罗凡 ^1,2, ,
杨雪蕾 ^1,2, ,
周海梅 ^1, ,
李昕欣 ^1,

1.
中国科学院上海微系统与信息技术研究所传感技术国家重点实验室, 上海 200050;
2.
中国科学院大学, 北京 100049
基金项目:
本文系中国科学院前沿科学重点研究项目（No.QYZDJ-SSWJSC001）、上海市科委项目（No.14DZ1105102）、国家自然科学基金项目（Nos.91323304，61172151，60876081）和国家高技术研究发展计划（863计划）（No.2009AA04Z317）资助

摘要: 基于微机电系统（Micro-electro-mechanical systems，MEMS）技术制备了一种由微色谱柱和微热导检测器构成的单片集成微型气相色谱（Micro gas chromatography，μGC）芯片。与现有集成芯片相比，在高深宽比的微沟道内构筑了一层高比表面积的介孔二氧化硅纳米颗粒薄膜作为固定相，有效提高了微色谱柱的柱容量和分离性能；微色谱柱的入口和出口处采用稳固的悬浮型微热敏结构，提高了器件的热隔离性能和稳定性。实验结果表明，此单片集成芯片可实现基线分离轻烃类混合气体组分（甲烷，乙烷，丙烷和丁烷），分析检测时间为33 s。其中，乙烷和丙烷的分离度为8.34，丙烷的理论塔板数高达11420。单片集成微型气相色谱芯片具有高分离度、高柱效、分析检测时间短等优点，特别适用于便携式气相色谱与野外实地检测。

关键词:

English

Study of Monolithic Integrated Micro Gas Chromatography Chip

1.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China
Received Date: 12 January 2018
Revised Date: 23 April 2018
Fund Project:
This work was supported by the Key Research Program of Frontier Sciences of Chinese Academy of Sciences (No. QYZDJ-SSWJSC001), the Science and Technology Commission of Shanghai Municipality (No. 14DZ1105102), the National Natural Science Foundation of China (Nos.91323304, 61172151, 60876081), and the National High Technology Research and Development Program of China (No. 2009AA04Z317).

Abstract: A monolithic micro gas chromatography (μGC) chip integrated by a micro separation column (μSC) and a micro thermal conductivity detector (μTCD) was fabricated based on micro-electro-mechanical system (MEMS) technique. Compared with the state of the art, the μSC with high depth-to-width ratio channels, coated with mesoporous silica nanoparticles as stationary phase, could effectively improve the column capacity and separation performance. Besides, the stable suspending μTCD, which was designed and fabricated in two ports of the μGC chip, could availably enhance the thermal isolation and reliability of the device. The mixture of light hydrocarbons (methane, ethane, propane and butane) could be separated by base line and detected by this monolithic integrated μGC chip, in which the overall analysis and detection time was only 33 seconds, the separation resolution of ethane and propane was 8.34, and the number of theoretical plates was as high as 11420. This monolithic integrated μGC chip had the advantages including good separation resolution, high column efficiency and short analysis time, which was highly suitable for portable gas chromatographic field and onsite detection.

Key words:

Monolithic integrated micro gas chromatography chip
/ Micro separation column
/ Micro thermal conductivity detectors
/ Mesoporous silica nanoparticles
/ Micro-electro-mechanical systems

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沈阳化工大学材料科学与工程学院沈阳 110142

单片集成微型气相色谱芯片研究

English

Study of Monolithic Integrated Micro Gas Chromatography Chip

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通讯作者: 陈斌, bchen63@163.com

中国化学会秘书处

单片集成微型气相色谱芯片研究

English

Study of Monolithic Integrated Micro Gas Chromatography Chip

CCS Chemistry：嵌段共聚物自组装成 “三明治”二维有机材料，实现纳米级压力传感功能

CCS Chemistry：颜徐州、鲍哲南： 你的皮肤可能是一片SPMs

CCS Chemistry：工作高效不疲劳，只须让催化剂动起来

CCS Chemistry：静电组装导向聚合- 聚电解质纳米凝胶量化制备新策略

CCS Chemistry：金黄色葡萄球菌醛基脱氢酶是如何识别特异性底物的？

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