Citation:
LIU Yuan, SHEN Jun, LI Xiao-Guang, ZHOU Bin, ZHANG Zhi-Hua. Effect of Hydrophobicity on the Vacuum-Contamination Resistance and Laser Damage Threshold of Sol-Gel Silica Coating[J]. Chinese Journal of Inorganic Chemistry,
;2013, 29(7): 1339-1344.
doi:
10.3969/j.issn.1001-4861.2013.00.233
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Silica antireflective coatings modified by hexamethyldisilazane (HMDS) were deposited on clean substrates by sol-gel process. The effects of HMDS on the contamination resistant capability and laser-induced damage threshold (LIDT) of coatings were investigated. With the modified sol the resultant coatings were hydrophobic and the contact angle for water increased with the increasing amount of HMDS in the reaction mixture. The antireflective properties were retained after HMDS-treatment and the transmission maximum values were above 99%. The introduction of HMDS into silica sols had also increased the LIDT of coatings from 24.3 J·cm-2 to 37 J·cm-2 when the molar ratio of HMDS to TEOS was 0.05:1. After some of the hydroxyl groups on the surface of the SiO2 particle were replaced by methyl groups, from which the SiO2 particle gained a water-repellent surface, the stability of coatings in vacuum were increased. The peak transmittance of modified sample decreased only 0.25% after conserved in vacuum circumstance for 168 hours, in contrast to 2% reduction for the unmodified sample. At the same time, the LIDT of modified coating retained a high LIDT of 30.8 J·cm-2.
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