Citation: LIU Lin, LI Zhi-Sheng, HU Hui-Dong, SONG Wei-Li. Insight into Macroscopic Metal-Assisted Chemical Etching for Silicon Nanowires[J]. Acta Physico-Chimica Sinica, ;2016, 32(4): 1019-1028. doi: 10.3866/PKU.WHXB201602183 shu

Insight into Macroscopic Metal-Assisted Chemical Etching for Silicon Nanowires

LIU Lin ^1,2,, ,
LI Zhi-Sheng ¹ ,
HU Hui-Dong ¹ ,
SONG Wei-Li ³

1.
1. State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, School of Renewable Energy, North China Electric Power University, Beijing 102206, P. R. China;
2.
2. Beijing Key Laboratory of Energy Conversion and Storage Materials, Beijing Normal University, Beijing 100875, P. R. China;
3.
3. Institute of Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, P. R. China

Corresponding author: LIU Lin,
Received Date: 30 December 2015
Available Online: 15 February 2016
Fund Project: 中国博士后科学基金面上项目(2014M560934) (2014M560934)中央高校基本科研业务费项目(2015QN16)资助 (2015QN16)

To understand the principles of the fabrication of nanowire arrays using macroscopic metal-assisted chemical etching (MACE), Si nanowires (SiNWs) are synthesized using Ag-coated Si substrates and Pt electrodes by the macroscopic MACE. Analysis of the SiNWmorphology coupled with the corresponding current density in the MACE process is applied to systematically investigate the effects of the electrical connection, Ag coating, etching conditions, Si substrates, and light irradiation on the formation of SiNWs. It is found that there is a certain relationship between the current density and the SiNWlength. Amode is proposed to fundamentally understand the mechanisms of the preparation of SiNWs using MACE. Associated opportunities are also discussed.
- Semiconductor,
- Microstructure,
- Electrochemistry,
- Silicon nanowire,
- Metal etching
1. [1]
  (1) Brodoceanu, D.; Alhmoud, H. Z.; Elnathan, R.; Delalat, B.; Voelcker, N. H.; Kraus, T. Nanotechnology 2016, 27, 075301. doi: 10.1088/0957-4484/27/7/075301
2. [2]
  (2) Cao, M. S.; Yang, J.; Song, W. L.; Zhang, D. Q.;Wen, B.; Jin, H. B.; Hou, Z. L.; Yuan, J. ACS Appl. Mater. Interfaces 2012, 4, 6948. doi: 10.1021/am3021069
3. [3]
  (3) Cao, M. S.; Song, W. L.; Hou, Z. L.; Yang, J. Carbon 2010, 48, 788. doi: 10.1016/j.carbon.2009.10.028
4. [4]
  (4) Cao, M. S.; Shi, X. L.; Fang, X. Y.; Jin, H. B.; Hou, Z. L.; Zhou, W.; Chen, Y. J. Appl. Phys. Lett. 2007, 91, 203110. doi: 10.1063/1.2803764
5. [5]
  (5) Zhou, X.; Sun, M. Q.;Wang, G. C. Acta Phys. -Chim. Sin. 2016, 32, 975. [周晓, 孙敏强, 王庚超. 物理化学学报, 2016, 32, 975.] doi: 10.3866/PKU.WHXB201601281
6. [6]
  (6) Wang, J. D.; Peng, T. J.; Xian, H. Y.; Sun, H. J. Acta Phys. -Chim. Sin. 2015, 31, 90. [汪建德, 彭同江, 鲜海洋, 孙红娟. 物理化学学报, 2015, 31, 90.] doi: 10.3866/PKU.WHXB201411202
7. [7]
  (7) Hu, R. J.;Wang, J.; Zhu, H. C. Acta Phys. -Chim. Sin. 2015, 31, 1997. [胡瑞金, 王兢, 朱慧超. 物理化学学报, 2015, 31, 1997.] doi: 10.3866/PKU.WHXB201508241
8. [8]
  (8) Wagner, R. S.; Ellis, W. C. Appl. Phys. Lett. 1964, 4, 89. doi: 10.1063/1.1753975
9. [9]
  (9) Lee, G.;Woo, Y. S.; Yang, J. E.; Lee, D. H.; Kim, C. J.; Jo, M. H. Angew. Chem. Int. Edit. 2009, 48, 7366. doi: 10.1002/anie.v48:40
10. [10]
  (10) Kolasinski, K.W. Curr. Opin. Solid State Mater. Sci. 2005, 9, 73. doi: 10.1016/j.cossms.2006.03.004
11. [11]
  (11) Lehmann, V.; Stengl, R.; Luigart, A. Mater. Sci. Eng. B 2000, 69, 11. doi: 10.1016/S0921-5107(99)00286-X
12. [12]
  (12) Peng, K. Q.;Wu, Y.; Fang, H.; Zhong, X. Y.; Xu, Y.; Zhu, J. Angew. Chem. Int. Edit. 2005, 44, 2737. doi: 10.1002/anie.200462995
13. [13]
  (13) Peng, K. Q.; Zhu, J. Electrochim. Acta 2004, 49, 2563. doi: 10.1016/j.electacta.2004.02.009
14. [14]
  (14) Liu, L.; Peng, K. Q.; Hu, Y.;Wu, X. L.; Lee, S. T. Adv. Mater. 2014, 26, 1410. doi: 10.1002/adma.201304327
15. [15]
  (15) Huang, Z. P.; Geyer, N.;Werner, P.; Boor, J. D.; Gösele, U. Adv. Mater. 2011, 23, 285. doi: 10.1002/adma.v23.2
16. [16]
  (16) Hochbaum, A. I.; Chen, R.; Delgado, R. D.; Liang, W. J.; Garnett, E. C.; Najarian, M.; Majumdar, A.; Yang, P. D. Nature 2008, 451, 163. doi: 10.1038/nature06381
17. [17]
  (17) Brammer, K. S.; Choi, C.; Oh, S.; Cobb, C. J.; Connelly, L. S.; Loya, M.; Kong, S. D.; Jin, S. Nano Lett. 2009, 9, 3570. doi: 10.1021/nl901769m
18. [18]
  (18) Liu, L.;Wang, Y. T. Acta Phys. Sin. 2015, 64, 148201. doi: 10.7498/aps.64.148201
19. [19]
  (19) Liu, L. Sci. China Tech. Sci. 2015, 58, 362. doi: 10.1007/ s11431-014-5740-9
20. [20]
  (20) Tsujino, K.; Matsumura, M. Adv. Mater. 2005, 17, 1045. doi: 10.1002/adma.200401681
21. [21]
  (21) Liu, L. J. Mater. Chem. C 2014, 2, 9631. doi: 10.1039/C4TC01431F
22. [22]
  (22) Ashruf, C. M. A.; French, P. J.; Bressers, P. M. M. C.; Kelly, J. J. Sens. Actuators 1999, 74, 118. doi: 10.1016/S0924-4247(98)00340-9
23. [23]
  (23) Ashruf, C. M. A.; French, P. J.; Sarro, P. M.; Kazinczi, R.; Xia, X. H.; Kelly, J. J. J. Micromech. Microeng. 2000, 10, 505. doi: 10.1088/0960-1317/10/4/304
24. [24]
  (24) Xia, X. H.; Ashruf, C. M. A.; French, P. J.; Kelly, J. J. Chem. Mater. 2000, 12, 1671. doi: 10.1021/cm9912066
25. [25]
  (25) Kelly, J. J.; Xia, X. H.; Ashruf, C. M. A.; French, P. J. IEEE Sens. J. 2001, 1, 127. doi: 10.1109/JSEN.2001.936930
26. [26]
  (26) Song, Y. Y.; Gao, Z. D.; Kelly, J. J.; Xia, X. H. Electrochem. Solid-State Lett. 2005, 8, C148. doi: 10.1149/1.2033616
27. [27]
  (27) Huang, Z. P.; Geyer, N.; Liu, L.F.; Li, M. Y.; Zhong, P. Nanotechnology 2010, 21, 465301. doi: 10.1088/0957-4484/21/46/465301
28. [28]
  (28) Chourou, M. L.; Fukami, K.; Sakka, T.; Virtanen, S.; Ogata, Y. H. Electrochim. Acta 2010, 55, 903. doi: 10.1016/j.electacta.2009.09.048
29. [29]
  (29) Kim, J.; Rhu, H.; Lee, W. J. Mater. Chem. 2011, 15889. doi: 10.1039/C1JM13831F
30. [30]
  (30) Weisse, J. M.; Lee, C. H.; Kim, D. R.; Cai, L.; Rao, P. M.; Zheng, X. Nano Lett. 2013, 13, 4362. doi: 10.1021/nl4021705
31. [31]
  (31) Lai, C. Q.; Zheng, W.; Choi, W. K.; Thompson, C. V. Nanoscale 2015, 7, 11123. doi: 10.1039/C5NR01916H
32. [32]
  (32) Huang, Z. P.; Zhang, X. X.; Reiche, M.; Liu, L. F.; Lee, W.; Shimizu, T.; Senz, S.; Gösele, U. Nano Lett. 2008, 8, 3046. doi: 10.1021/nl802324y
33. [33]
  (33) Huang, Z. P.; Shimizu, T.; Senz, S.; Zhang, Z.; Zhang, X. X.; Lee, W.; Geyer, N.; Gösele, U. Nano Lett. 2009, 9, 2519. doi: 10.1021/nl803558n
34. [34]
  (34) VanDjlk, H. J. A.; de Jonge, J. J. Electrochem. Soc. 1970, 177, 553. doi: 10.1149/1.2407568
35. [35]
  (35) Theunissen, M. J. J.; Appels, J. A.; Verkuylen, W. H. C.G. J. Electrochem. Soc. 1970, 117, 959. doi: 10.1149/1.2407698
36. [36]
  (36) Meek, R. L. J. Electrochem. Soc. 1971, 118, 437. doi: 10.1149/1.2408076 doi: 10.1149/1.2408076
37. [37]
  (37) Föll, H. Appl. Phys. A 1991, 53, 8. doi: 10.1007/BF00323428
38. [38]
  (38) Lehmann, V. J. Electrochem. Soc.1993, 140, 2836. doi: 10.1149/1.2220919
39. [39]
  (39) Bertagna, V.; Plougonven, C.; Rouelle, F.; Chemla, M. J. Electrochem. Soc. 1996, 143, 3532. doi: 10.1149/1.1837249
1. [1]
  Huan LI , Shengyan WANG , Long Zhang , Yue CAO , Xiaohan YANG , Ziliang WANG , Wenjuan ZHU , Wenlei ZHU , Yang ZHOU . Growth mechanisms and application potentials of magic-size clusters of groups Ⅱ-Ⅵ semiconductors. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1425-1441. doi: 10.11862/CJIC.20240088
2. [2]
  Meng Lin , Hanrui Chen , Congcong Xu . Preparation and Study of Photo-Enhanced Electrocatalytic Oxygen Evolution Performance of ZIF-67/Copper(I) Oxide Composite: A Recommended Comprehensive Physical Chemistry Experiment. University Chemistry, 2024, 39(4): 163-168. doi: 10.3866/PKU.DXHX202308117
3. [3]
  Bing WEI , Jianfan ZHANG , Zhe CHEN . Research progress in fine tuning of bimetallic nanocatalysts for electrocatalytic carbon dioxide reduction. Chinese Journal of Inorganic Chemistry, 2025, 41(3): 425-439. doi: 10.11862/CJIC.20240201
4. [4]
  Zihan Lin , Wanzhen Lin , Fa-Jie Chen . Electrochemical Modifications of Native Peptides. University Chemistry, 2025, 40(3): 318-327. doi: 10.12461/PKU.DXHX202406089
5. [5]
  Cen Zhou , Biqiong Hong , Yiting Chen . Application of Electrochemical Techniques in Supramolecular Chemistry. University Chemistry, 2025, 40(3): 308-317. doi: 10.12461/PKU.DXHX202406086
6. [6]
  Yongming Zhu , Huili Hu , Yuanchun Yu , Xudong Li , Peng Gao . Construction and Practice on New Form Stereoscopic Textbook of Electrochemistry for Energy Storage Science and Engineering: Taking Basic Course of Electrochemistry as an Example. University Chemistry, 2024, 39(8): 44-47. doi: 10.3866/PKU.DXHX202312086
7. [7]
  Yongjian Zhang , Fangling Gao , Hong Yan , Keyin Ye . Electrochemical Transformation of Organosulfur Compounds. University Chemistry, 2025, 40(5): 311-317. doi: 10.12461/PKU.DXHX202407035
8. [8]
  Zehao Zhang , Zheng Wang , Haibo Li . Preparation of 2D V₂O₃@Pourous Carbon Nanosheets Derived from V₂CF_x MXene for Capacitive Desalination. Acta Physico-Chimica Sinica, 2024, 40(8): 2308020-0. doi: 10.3866/PKU.WHXB202308020
9. [9]
  Linbao Zhang , Weisi Guo , Shuwen Wang , Ran Song , Ming Li . Electrochemical Oxidation of Sulfides to Sulfoxides. University Chemistry, 2024, 39(11): 204-209. doi: 10.3866/PKU.DXHX202401009
10. [10]
  Zhaoyu Wen , Na Han , Yanguang Li . Recent Progress towards the Production of H₂O₂ by Electrochemical Two-Electron Oxygen Reduction Reaction. Acta Physico-Chimica Sinica, 2024, 40(2): 2304001-0. doi: 10.3866/PKU.WHXB202304001
11. [11]
  Shuhui Li , Rongxiuyuan Huang , Yingming Pan . Electrochemical Synthesis of 2,5-Diphenyl-1,3,4-Oxadiazole: A Recommended Comprehensive Organic Chemistry Experiment. University Chemistry, 2025, 40(5): 357-365. doi: 10.12461/PKU.DXHX202407028
12. [12]
  Qiaoqiao BAI , Anqi ZHOU , Xiaowei LI , Tang LIU , Song LIU . Construction of pressure-temperature dual-functional flexible sensors and applications in biomedicine. Chinese Journal of Inorganic Chemistry, 2024, 40(12): 2259-2274. doi: 10.11862/CJIC.20240128
13. [13]
  Hongyi LI , Aimin WU , Liuyang ZHAO , Xinpeng LIU , Fengqin CHEN , Aikui LI , Hao HUANG . Effect of Y(PO₃)₃ double-coating modification on the electrochemical properties of Li[Ni_0.8Co_0.15Al_0.05]O₂. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1320-1328. doi: 10.11862/CJIC.20230480
14. [14]
  Jianfeng Yan , Yating Xiao , Xin Zuo , Caixia Lin , Yaofeng Yuan . Comprehensive Chemistry Experimental Design of Ferrocenylphenyl Derivatives. University Chemistry, 2024, 39(4): 329-337. doi: 10.3866/PKU.DXHX202310005
15. [15]
  Yifei Cheng , Jiahui Yang , Wei Shao , Wanqun Zhang , Wanqun Hu , Weiwei Li , Kaiping Yang . Learning Goes Beyond the Written Word: Practical Insights from the “Leaf Electroplating” Popular Science Experiment. University Chemistry, 2024, 39(9): 319-327. doi: 10.3866/PKU.DXHX202310033
16. [16]
  Kuaibing Wang , Honglin Zhang , Wenjie Lu , Weihua Zhang . Experimental Design and Practice for Recycling and Nickel Content Detection from Waste Nickel-Metal Hydride Batteries. University Chemistry, 2024, 39(11): 335-341. doi: 10.12461/PKU.DXHX202403084
17. [17]
  Kuaibing Wang , Feifei Mao , Weihua Zhang , Bo Lv . Design and Practice of a Comprehensive Teaching Experiment for Preparing Biomass Carbon Dots from Rice Husk. University Chemistry, 2025, 40(5): 342-350. doi: 10.12461/PKU.DXHX202407042
18. [18]
  Zeqiu Chen , Limiao Cai , Jie Guan , Zhanyang Li , Hao Wang , Yaoguang Guo , Xingtao Xu , Likun Pan . Advanced electrode materials in capacitive deionization for efficient lithium extraction. Acta Physico-Chimica Sinica, 2025, 41(8): 100089-0. doi: 10.1016/j.actphy.2025.100089
19. [19]
  Xinyi Zhang , Kai Ren , Yanning Liu , Zhenyi Gu , Zhixiong Huang , Shuohang Zheng , Xiaotong Wang , Jinzhi Guo , Igor V. Zatovsky , Junming Cao , Xinglong Wu . Progress on Entropy Production Engineering for Electrochemical Catalysis. Acta Physico-Chimica Sinica, 2024, 40(7): 2307057-0. doi: 10.3866/PKU.WHXB202307057
20. [20]
  Lutian Zhao , Yangge Guo , Liuxuan Luo , Xiaohui Yan , Shuiyun Shen , Junliang Zhang . Electrochemical Synthesis for Metallic Nanocrystal Electrocatalysts: Principle, Application and Challenge. Acta Physico-Chimica Sinica, 2024, 40(7): 2306029-0. doi: 10.3866/PKU.WHXB202306029

Get Citation

PDF

XML

Metrics

PDF Downloads(0)
Abstract views(520)
HTML views(40)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142