Citation: XU Hao, LU Fang, FU Zheng-Wen. Effects of Substrate-Target Distance and Si Co-Doping on the Properties of Al-Doped ZnO Films Deposited by Magnetron Sputtering[J]. Acta Physico-Chimica Sinica, ;2011, 27(05): 1232-1238. doi: 10.3866/PKU.WHXB20110422 shu

Effects of Substrate-Target Distance and Si Co-Doping on the Properties of Al-Doped ZnO Films Deposited by Magnetron Sputtering

XU Hao ^1,2 ,
LU Fang ¹ ,
FU Zheng-Wen ^2,

1.
1. Shanghai Key Laboratory of Molecular Catalysts and Innovative Materials, Surface Physics Laboratory & Department of Physics, Fudan University, Shanghai 200433, P. R. China;
2. Department of Chemistry & Laser Chemistry Institute, Fudan University, Shanghai 200433, P. R. China

Received Date: 20 December 2010
Available Online: 10 March 2011
Fund Project: 上海科学技术委员会(08DZ2270500, 09JC1401300) (08DZ2270500, 09JC1401300) 国家自然科学基金(20773031) (20773031) 国家重点基础研究发展规划(973) (2007CB209702) (973) (2007CB209702) 国家高技术研究发展计划(863) (2007AA03Z322)资助项目 (863) (2007AA03Z322)

Transparent conductive Al-doped ZnO (AZO) and Si-codoped AZO (AZO:Si) films were deposited on square quartz substrates by radio frequency (RF) magnetron sputtering. The effect of distance between the substrate and target (D_st) and the effect of co-doping Si on the electrical and optical properties of the AZO films were systematically investigated. The resistivity, carrier concentration, and mobility were found to be strongly dependent on the D_st values. With a decrease in D_st, the carrier concentration and mobility increased significantly, which resulted in improved conductivity. The lowest resistivity of 4.94×10^-4 Ω·cm was obtained at a D_st of 4.5 cm, and this was associated with a carrier concentration of 3.75×10²⁰ cm^-3 and a mobility of 33.7 cm²·V^-1·s^-1. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) spectroscopy, and grain boundary scattering models were used to analyze the relationship between the carrier concentration and the mobility at different deposition (D_st) values. Transmittance spectra showed an average transmittance of >93% in the visible-near infrared range for all the samples and a blue shift of the absorption edge with a decrease in D_st. AZO:Si films had high-conductance and high-transmittance optical properties compared with AZO films, and they had better resistivity stability than the AZO films when exposed to a hot and damp atmosphere, which is practically meaningful.
- AZO,
- AZO:Si,
- Substrate-target distance,
- Radio frequency magnetron sputtering
1. [1]
  
  (1) Ellmer, K. Transparent Conductive Zinc Oxide; Springer Press: Heidelberg, 2008; pp 35-78.
2. [2]
  (2) Kim, K. H.; Park, K. C.; Ma, D. Y. J. Appl. Phys. 1997, 81, 7764.
3. [3]
  (3) Minami, T.; Sato, H.; Ohashi, K.; Tomofuji, T.; Takata, S. J. Cryst. Growth 1992, 117, 370.
4. [4]
  (4) Ellmer, K.; Mientus, R. Thin Solid Films 2008, 516, 4620.
5. [5]
  (5) Song, D. Y.; Widenborg, P.; Chin, W.; Aberle, A. G. Sol. Energy Mater. Sol. Cells 2002, 73, 1.
6. [6]
  (6) Lorenz, M.; Kaidashev, E. M.; von Wenckstern, H.; Riede, V.; Bundesmann, C.; Spemann, D.; Benndorf, G.; Hochmuth, H.; Rahm, A.; Semmelhack, H. C.; Grundmann, M. Solid-State Electron 2003, 47, 2205.
7. [7]
  (7) Singh, A. V.; Mehra, R. M.; Buthrath, N.; Wakahara, A.; Yoshida, A. J. Appl. Phys. 2001, 90, 5661.
8. [8]
  (8) Hu, J.; rdon, R. G. J. Appl. Phys. 1992, 71, 880.
9. [9]
  (9) Xue, S. W.; Zu, X. T.; Zheng, W. G.; Chen, M. Y.; Xiang, X. Physica B 2006, 382, 201.
10. [10]
  (10) Lee, J. C.; Kang, K. H.; Kim, S. K.; Yoon, K. H.; Park, I. J.; Song, J. Sol. Energy Mater. Sol. Cells 2000, 64, 185.
11. [11]
  (11) Kim, Y. H.; Lee, K. S.; Lee, T. S.; Cheong, B.; Seong, T. Y.; Kim, W. M. Appl. Surf. Sci. 2009, 255, 7251.
12. [12]
  (12) Ellmer, K.; Vollweiler, G. Thin Solid Films 2006, 496, 104.
13. [13]
  (13) Jeong, S. H.; Lee, J. W.; Lee, S. B.; Boo, J. H. Thin Solid Films 2003, 435, 78.
14. [14]
  (14) Yang, W. F.; Liu, Z. G.; Peng, D. L.; Zhang, F.; Huang, H. L.; Xie, Y. N.; Wu, Z. Y. Appl. Surf. Sci. 2009, 255, 5669.
15. [15]
  (15) Minami, T.; Sato, H.; Nanto, H.; Takata, S. Jpn. J. Appl. Phys. 1986, 25, L776.
16. [16]
  (16) Nomoto, J.; Miyata, T.; Minami, T. J. Vac. Sci. Technol. A 2009, 27, 1001.
17. [17]
  (17) Azaroff, L. V. Elements of X-ray Crystallography; McGraw- Hill: New York, 1968.
18. [18]
  (18) Seto, J. Y. W. J. Appl. Phys. 1975, 46, 5247.
19. [19]
  (19) Masetti, G.; Severi, M.; Solmi, S. IEEE Trans. Electron Devices 1983, 30, 764.
20. [20]
  (20) Cornelius, S.; Vinnichenko, M.; Shevchenko, N.; Ro zin, A.; Kolitsch, A.; Möller, W. Appl. Phys. Lett. 2009, 94, 042103.
21. [21]
  (21) Burstein, E. Phys. Rev. 1954, 93, 775.
22. [22]
  (22) Moss, T. S. Proc. R. Proceedings of the Physical Society of London Section B 1954, 67, 775.
23. [23]
  (23) Ziegler, E.; Heinrich, A.; Oppermann, H.; Stöver G. Phys. Status Solidi A 1981, 66, 635.
24. [24]
  (24) Minami, T.; Miyata, T. Thin Solid Films 2008, 517, 1474.
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