Home

Citation: Zhang Yu, Jin Xin-Yu, Chen Kang-Sheng. Simulation Analysis of Active Particles in Plasma Polymerization Film Deposition[J]. Acta Physico-Chimica Sinica, ;2000, 16(10): 892-898. doi: 10.3866/PKU.WHXB20001006 shu

Simulation Analysis of Active Particles in Plasma Polymerization Film Deposition

1.
Department of Information and Electronic Engineering,Hangzhou 310027

Received Date: 13 January 2000
Available Online: 15 October 2000

The active particles movements in hydrogen, oxygen and nitrogen DC glow discharge plasma have been simulated and analyzed by applying the electromagnetic theories and Monte Carlo simulation techniques. The energy and spatial density distribution graphs have been obtained. By comparison with the active energy range of ions, the results showed that in hydrogen and oxygen plasma there are sufficient active ions to participate in the physical and chemical reactions with the monomer molecules, which resulted in high deposition speed; in nitrogen plasma there are very few ions with sufficient active energy, which resulted in low deposition speed.
- Particle enery,
- Monte Carlo simulation,
- Hydrogen
1. [1]
  Kezhen Qi , Bei Cheng , Kaiqiang Xu . Ultrafast interfacial charge transfer promoted by the LSPR of Au nanoparticles for photocatalytic H₂ evolution. Acta Physico-Chimica Sinica, 2026, 42(3): 100205-0. doi: 10.1016/j.actphy.2025.100205
2. [2]
  Kangren Kong , Zaiqiang Ma , Yu Yin , Zhaoming Liu , Ruikang Tang . Nuclear magnetic resonance-guided Monte Carlo/molecular dynamics structure inference for amorphous solids. Chinese Journal of Structural Chemistry, 2026, 45(3): 100773-100773. doi: 10.1016/j.cjsc.2025.100773
3. [3]
  Yujin Deng , Yishuang Chen , Lijie Zhang , Huile Jin , Yun Yang , Quanlong Xu , Shun Wang . Plasmonic Au nanobipyramid assembly covalent organic framework for boosting photocatalytic hydrogen evolution through strong local electric field. Acta Physico-Chimica Sinica, 2026, 42(6): 100193-0. doi: 10.1016/j.actphy.2025.100193
4. [4]
  Xingyuan Lu , Yutao Yao , Junjing Gu , Peifeng Su . Energy Decomposition Analysis and Its Application in the Many-Body Effect of Water Clusters. University Chemistry, 2025, 40(3): 100-107. doi: 10.12461/PKU.DXHX202405074
5. [5]
  Donghui PAN , Yuping XU , Xinyu WANG , Lizhen WANG , Junjie YAN , Dongjian SHI , Min YANG , Mingqing CHEN . Preparation and in vivo tracing of ⁶⁸Ga-labeled PM_2.5 mimetic particles for positron emission tomography imaging. Chinese Journal of Inorganic Chemistry, 2024, 40(4): 669-676. doi: 10.11862/CJIC.20230468
6. [6]
  Zhipeng Bao , Yilin Wang , Yu Chen , Beirui Jia , Congcong Wang , Zean Xie , Xuehua Yu , Zhen Zhao . Digital and Intelligent Integration under the “Dual Carbon” Strategy: Plasma Reaction-Separation Coupling for CO₂ Hydrogenation to Methanol. University Chemistry, 2026, 41(1): 29-40. doi: 10.12461/PKU.DXHX202506009
7. [7]
  Tieping CAO , Yuejun LI , Dawei SUN . Surface plasmon resonance effect enhanced photocatalytic CO₂ reduction performance of S-scheme Bi₂S₃/TiO₂ heterojunction. Chinese Journal of Inorganic Chemistry, 2025, 41(5): 903-912. doi: 10.11862/CJIC.20240366
8. [8]
  Kexin Dong , Chuqi Shen , Ruyu Yan , Yanping Liu , Chunqiang Zhuang , Shijie Li . Integration of Plasmonic Effect and S-Scheme Heterojunction into Ag/Ag₃PO₄/C₃N₅ Photocatalyst for Boosted Photocatalytic Levofloxacin Degradation. Acta Physico-Chimica Sinica, 2024, 40(10): 2310013-0. doi: 10.3866/PKU.WHXB202310013
9. [9]
  Yingran Liang , Fei Wang , Jiabao Sun , Hongtao Zheng , Zhenli Zhu . Construction and Application of a New Experimental Device for Determination of Alkaline Metal Elements by Plasma Atomic Emission Spectrometry Based on Solution Cathode Glow Discharge: An Alternative Approach for Fundamental Teaching Experiments in Emission Spectroscopy. University Chemistry, 2024, 39(5): 380-387. doi: 10.3866/PKU.DXHX202312024
10. [10]
  Xiaochen Zhang , Fei Yu , Jie Ma . Cutting-Edge Applications of Multi-Angle Numerical Simulations for Capacitive Deionization. Acta Physico-Chimica Sinica, 2024, 40(11): 2311026-0. doi: 10.3866/PKU.WHXB202311026
11. [11]
  Heng Zhang , Ying Ma , Shiling Yuan . Machine Learning-based Prediction of Antifouling Performance in Polymer Materials: An Integrated Molecular Simulation Experiment. University Chemistry, 2026, 41(1): 346-353. doi: 10.12461/PKU.DXHX202506015
12. [12]
  Shengyuan Zhong , Jing Zhong , Yuyao Zhou , Lifeng Ruan , Weitai Wu , Bin Ren . 胶体粒子粒径测量的改进实验. University Chemistry, 2026, 41(5): 1-13. doi: 10.12461/PKU.DXHX202511149
13. [13]
  Yajie Li , Bin Chen , Yiping Wang , Hui Xing , Wei Zhao , Geng Zhang , Siqi Shi . Inhibiting Dendrite Growth by Customizing Electrolyte or Separator to Achieve Anisotropic Lithium-Ion Transport: A Phase-Field Study. Acta Physico-Chimica Sinica, 2024, 40(3): 2305053-0. doi: 10.3866/PKU.WHXB202305053
14. [14]
  Yanhui XUE , Shaofei CHAO , Man XU , Qiong WU , Fufa WU , Sufyan Javed Muhammad . Construction of high energy density hexagonal hole MXene aqueous supercapacitor by vacancy defect control strategy. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1640-1652. doi: 10.11862/CJIC.20240183
15. [15]
  Yongming Guo , Jie Li , Chaoyong Liu . Green Improvement and Educational Design in the Synthesis and Characterization of Silver Nanoparticles. University Chemistry, 2024, 39(3): 258-265. doi: 10.3866/PKU.DXHX202309057
16. [16]
  Jie WEI , Qing ZHOU , Dandan DING , Xiang JING , Fei LI . Photothermal toxicity of Prussian blue nanoparticles to cervical cancer cells. Chinese Journal of Inorganic Chemistry, 2025, 41(11): 2345-2357. doi: 10.11862/CJIC.20240435
17. [17]
  Ruonan Li , Shijie Liang , Yunhua Xu , Cuifen Zhang , Zheng Tang , Baiqiao Liu , Weiwei Li . Chlorine-Substituted Double-Cable Conjugated Polymers with Near-Infrared Absorption for Low Energy Loss Single-Component Organic Solar Cells. Acta Physico-Chimica Sinica, 2024, 40(8): 2307037-0. doi: 10.3866/PKU.WHXB202307037
18. [18]
  Xinglong ZHANG , Zhonghui LI , Jifeng BAN , Xingsheng ZHAO , Changli LIU , Xiaokang JIANG , Hengwei ZHOU . Color-tunable luminescence and energy transfer in Cs₂NaGdCl₆ via a Sb³⁺/Sm³⁺ co-doping strategy. Chinese Journal of Inorganic Chemistry, 2026, 42(6): 1237-1246. doi: 10.11862/CJIC.20250322
19. [19]
  Cuicui Yang , Bo Shang , Xiaohua Chen , Weiquan Tian . Understanding the Wave-Particle Duality and Quantization of Confined Particles Starting from Classic Mechanics. University Chemistry, 2025, 40(3): 408-414. doi: 10.12461/PKU.DXHX202407066
20. [20]
  Gaopeng Liu , Lina Li , Bin Wang , Ningjie Shan , Jintao Dong , Mengxia Ji , Wenshuai Zhu , Paul K. Chu , Jiexiang Xia , Huaming Li . Construction of Bi Nanoparticles Loaded BiOCl Nanosheets Ohmic Junction for Photocatalytic CO₂ Reduction. Acta Physico-Chimica Sinica, 2024, 40(7): 2306041-0. doi: 10.3866/PKU.WHXB202306041

Get Citation

PDF

XML

Metrics

PDF Downloads(2570)
Abstract views(3541)
HTML views(74)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Address：Zhongguancun North First Street 2,100190 Beijing, PR China Tel: +86-010-82449177-888

DownLoad: Full-Size Img PowerPoint

Return