Citation:
Zhang Da-Heng. Adsorption and Desorption of Oxygen on the Surface of Polycrystalline ZnO Films Deposited by r.f.Sputtering[J]. Acta Physico-Chimica Sinica,
;1995, 11(09): 791-795.
doi:
10.3866/PKU.WHXB19950906
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Hexa nal ZnO films with the preferred growth orientation of c axis parallel to the substrate have been deposited by r.f. sputtering. An electrical field induced oxygen adsorption was observed on these films. Oxygen adsorption produced by illumination of a UV light or/and reaction with Ar plasma increased the conductivity of the films by 6-7 orders of magnitude and an accumulation layer displayed on the surface of the films.
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Keywords:
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ZnO
, - Adsorption,
- Desorption,
- Photodesorption,
- Photoresponse
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