Progress in Application of Atomic Layer Deposition Technique in Electroanalytical Chemistry
- Corresponding author: ZHANG Li-Xue, zhanglx@qdu.edu.cn
Citation:
LIU Jin-Zheng, ZHANG Li-Xue. Progress in Application of Atomic Layer Deposition Technique in Electroanalytical Chemistry[J]. Chinese Journal of Analytical Chemistry,
;2021, 49(11): 1767-1778.
doi:
10.19756/j.issn.0253-3820.210481
CHALKER P R. Surf. Coat Technol., 2016, 291(15):258-263.
GEORGE S M. Chem. Rev., 2010, 110(1):111-131.
RITALA M, LESKELA M. Handbook of Thin Films:Atomic Layer Deposition. Academic Press, 2002:103-159.
MALYGIN A A, DROZD V E, MALKOV A A, SMIRNOV V M. Chem. Vap. Deposition, 2015, 21(10):216-240.
PUURUNEN R L. Chem. Vap. Deposition, 2014, 20(10):332-344.
SUNTOLA T, ANTSON J. US Patent, 1977, 4(58):430.
HAMALAINEN J, RITALA M, LESKELA M. Chem. Mater., 2014, 26(1):786-801.
KIM H. J. Vac. Sci. Technol. B., 2003, 21(6):2231-2261.
MENGX B, CAOY Q, LIBERA J A, ELAM J W. Chem. Mater., 2017, 29(21):9043-9052.
AALTONEN T, RITALA M, TUNG Y L, CHI Y, ARSTILA K, MEINANDER K, LESKELA M. J. Mater. Res., 2004, 19(11):3353-3358.
HONG Y, KIM C H, SHIN J, KIM K Y, KIM J S, HWANG C S, LEE J H. Sens. Actuators, B, 2016, 232:653-659.
NAKASHIMA Y, OHNO Y, KISHIMOTO S, OKOCHI M, HONDA H, MIZUTANI T. J. Nanosci. Nanotechnol., 2010, 10(6):3805-3809.
CHIA C, SHULAKER M M, PROVINE J, JEFFREY S S, HOWE T R. ACS Appl. Mater. Interfaces, 2019, 11(29):26082-26092.
SONG G, WANG Y, QI Y, LI W, ZHANG L. Rare Met., 2020, 39(7):784-791.
WEBER M, IATSUNSKYI I, COY E, MIELE P, CORNU D, BECHELANY M. Adv. Mater. Interfaces, 2018, 5(16):1800056.
SUN F, DUAN Y, YANG Y, CHEN P, DUAN Y, WANG X, YANG D, XUE K. Org. Electron., 2014, 15(10):2546-2552.
JUR J S, SWEETIIIJ W, OLDHAM C J, PARSONS G N. Adv. Funct. Mater., 2011, 21(11):1993-2002.
WANG T, ZHU H, ZHUO J, ZHU Z, PAPAKONSTANTINOU P, LUBARSKY G, LIN J, LI M. Anal. Chem., 2013, 85(21):10289-10295.
BAI J, JIANG X. Anal. Chem., 2013, 85(17):8095-8101.
LIU J, BO X, ZHAO Z, GUO L. Biosens. Bioelectron., 2015, 74(15):71-77.
ROBERTS J G, VOINOV M A, SCHMIDT A C, SMIRNOVA T I, SOMBERS L A. J. Am. Chem. Soc., 2016, 138(8):2516-2519.
MARICHY C, PINNA N. Adv. Mater. Interfaces, 2016, 3(21):1600335.
CHAAYA A A, VITER R, BALEVICIUTE I, BECHELANY M, RAMANAVICIUS A, GERTNERE Z, ERTS D, SMYNTYNA V, MIELE P. J. Phys. Chem. C, 2014, 118(7):3811-3819.
GU Y, LU H, GENG Y, YE Z, ZHANG Y, SUN Q, DING S, ZHANG D. Nanoscale Res. Lett., 2013, 8(1):107-111.
COP P, CELIK E, HESS K, MORYSON Y, KLEMENT P, ELM T M, SMARSLY M B. ACS Appl. Nano Mater., 2020, 3(11):10757-10766.
JIAO S, LIU L, WANG J, MA K, LV J. Small, 2020, 16(28):2001223.
LIU L, MA K, XU X, SHANGGUAN C, LV J, ZHU S, JIAO S, WANG J. ACS Appl. Mater. Interfaces, 2020,12(26):29074-29084.
WU L, ZHOU X, WAN G, TANG Y, SHI S, XU X, WANG G. Dalton Trans., 2021, 50(13):95-102.
OCTAVIO G, MATTHIEU W, SEBASTIEN B, PHILIPPE M, MIKHAEL B. Biosens. Bioelectron., 2018, 122:147-159.
LESKELA M, RITALA M. Angew. Chem., Int. Ed., 2003, 42(45):5548-5554.
ASUNDI S A, RAIFORD A J, BENT F S. ACS Energy Lett., 2019,4(4):908-925.
PUURUNEN R L. J. Appl. Phys., 2005, 97(12):121301.
FABREGUETTE F H, WIND R A, GEORGE S M. Appl. Phys. Lett., 2006, 88(1):013116.
GRONER M D, ELAM J W, FABREGUETTE F H, GEORGE S M. Thin Solid Films, 2002, 413(1-2):186-197.
YANG P, TONG X, WANG G, GAO Z, GUO X, QIN Y. ACS Appl. Mater. Interfaces, 2015, 7(8):4772-4777.
WA Q, XIONG W, ZHAO R, HE Z, CHEN Y, WANG X. ACS Appl. Nano Mater., 2019, 2(7):4427-4434.
CHOI T, KIM S H, LEE C W, KIM H, CHOI S K, KIM S H, KIM E, PARK J, KIM H. Biosens. Bioelectron.,2015, 63:325-330.
RAZA M H, MOVLAEE K, WU Y, SAYED M, KARG M, LEONARDI G S, NERI G, PINNA N. ChemElectroChem, 2019, 6(2):383-392.
ZHUIYKOV S, HYDE L, HAI Z, AKBARI M K, KATS E, DETAVERNIER C, XUE C, XU C. Appl. Mater. Today, 2017, 6:44-53.
XU H, WEI Z, VERPOORT F, HU J, ZHUIYKOV S. Nanoscale Res. Lett., 2020, 15(1):41-55.
ZHANG C, HUANG B, QIAN L, YUAN S, WANG S, CHEN R. ChemPhysChem, 2016, 17(1):98-104.
WEI Z, HAI Z, AKBARI M K, QI D, XING K, ZHAO Q, VERPOORT F, HU J, HYDE L, ZHUIYKOV S. Sens. Actuators, B, 2018, 262:334-344.
ZHAO L, YU J, YUE S, ZHANG L, WANG Z, GUO P, LIU Q. J. Electroanal. Chem., 2018, 808:245-251.
JANG D Y, KIM Y P, KIM H S, KO P S H, CHOI S Y, CHOI Y K. J. Vac. Sci. Technol., B:Microelectron. Nanometer Struct.-Process., Meas., Phenom., 2007, 25(2):443-447.
CHEN Y, LIU M, KANEKO T, MCINTYRE C P. Electrochem. Solid-State Lett., 2010, 13(3):29-32.
MA F, YANG B, ZHAO Z, ZHAO Y, PAN R, WANG D, KONG Y, CHEN Y, HUANG G, KONG J, MEI Y. ACS Appl. Nano Mater., 2020, 3(10):10032-10039.
WINKLER T E, DIETRICH R, KIM E, BEN Y H, KELLY D L, PAYNE G F, GHODSSI R. Electrochem. Commun., 2017, 79:33-36.
CHEN P, MITSUIT B, FARMER B D, GOLOVCHENKO J, GORDON G R, BRANTON D. Nano Lett., 2004, 4(7):1333-1337.
LEPOITEVIN M, BECHELANY M, BALANZAT E, JANOT J M, BALME S. Electrochim. Acta, 2016, 211:611-618.
NG S, PRASEK J, ZAZPE R, PYTLICEK Z, SPOTZ Z, PEREIRA Z R, MICHALICKA J, PRIKRYL J, MILOSKRBAL M, SOPHA H, HUBALEK J, MACAK M J. ACS Appl. Mater. Interfaces, 2020, 12(29):33386-33396
FAN K, GUO J, CHA L, CHEN Q, MA J. J. Alloys Compd., 2017, 698:336-340.
LIU B, ALAMRI M, WALSH M, DOOLIN L J, BERRIE L C, WU Z J. ACS Appl. Mater. Interfaces, 2020, 12(47):53115-53124.
WEI Z, HAI Z, AKBARI M K, HU J, HYDE L, DEPUYDT S, VERPOORT F, ZHUKOV S. ChemElectroChem, 2018, 5(2):266-272.
BAE G, JEON S I, JANG M, SONG W, MYUNG S, LIM J, LEE S S, JUNG H K, PARK H Y, AN K S. ACS Appl. Mater. Interfaces, 2019, 11(18):16830-16837.
HONG Y, WU M, BAE J H, HONG S, JEONG Y, JANG D, KIM S J, HWANG S H, PARK B G, LEE J H, Sens. Actuators, B, 2020, 302:127147.
JIN C, KIM H, PARK S, CHOI S W, KIM S S, LEE C. Surf. Interface Anal., 2012, 44(11-12):1534-1537.
BANG H J, LEE N, MIRZAEI A, CHOI S M, CHOI H, JEON H, KIM S S, KIM W H. Sens. Actuators, B, 2020, 319:128309.
KONDALKAR V V, DUY T L, SEO H, LEE K. ACS Appl. Mater. Interfaces, 2019, 11(29):25891-25900.
TAKACS M, DUCSO C, PAPE A. J. Mater. Sci.:Mater. Electron., 2017, 22(28):17148-17155.
YAO T, YAN L. Ceram. Int., 2020, 46(7):9936-9942.
XU Y, ZHENG L, YANG C, ZHENG W, LIU X, ZHANG J. Sens. Actuators, B, 2020, 310:127846.
LOU C, YANG C, ZHENG W, LIU X, ZHANG J. Sens. Actuators, B, 2021, 329:129218.
XU Y, LOU C, ZHENG L, ZHENG W, LIU X, KUMAR M, ZHANG J. Sens. Actuators, B, 2020, 307:127616.
RAZA M H, MOVLAEE K, LEONARDI S G, BARSAN N, NERI G, PINNA N. Adv. Funct. Mater., 2020, 30(6):1906874.
XU Y, ZHENG W, LIU X, ZHANG L, ZHENG L, YANG C, PINNA N, ZHANG J. Mater. Horiz., 2020, 7(6):1519-1527.
Xiaotian ZHU , Fangding HUANG , Wenchang ZHU , Jianqing ZHAO . Layered oxide cathode for sodium-ion batteries: Surface and interface modification and suppressed gas generation effect. Chinese Journal of Inorganic Chemistry, 2025, 41(2): 254-266. doi: 10.11862/CJIC.20240260
Yifeng Xu , Jiquan Liu , Bin Cui , Yan Li , Gang Xie , Ying Yang . “Xiao Li’s School Adventures: The Working Principles and Safety Risks of Lithium-ion Batteries”. University Chemistry, 2024, 39(9): 259-265. doi: 10.12461/PKU.DXHX202404009
Jiali CHEN , Guoxiang ZHAO , Yayu YAN , Wanting XIA , Qiaohong LI , Jian ZHANG . Machine learning exploring the adsorption of electronic gases on zeolite molecular sieves. Chinese Journal of Inorganic Chemistry, 2025, 41(1): 155-164. doi: 10.11862/CJIC.20240408
Fang Niu , Rong Li , Qiaolan Zhang . Analysis of Gas-Solid Adsorption Behavior in Resistive Gas Sensing Process. University Chemistry, 2024, 39(8): 142-148. doi: 10.3866/PKU.DXHX202311102
Qingyan JIANG , Yanyong SHA , Chen CHEN , Xiaojuan CHEN , Wenlong LIU , Hao HUANG , Hongjiang LIU , Qi LIU . Constructing a one-dimensional Cu-coordination polymer-based cathode material for Li-ion batteries. Chinese Journal of Inorganic Chemistry, 2024, 40(4): 657-668. doi: 10.11862/CJIC.20240004
Pengcheng Yan , Peng Wang , Jing Huang , Zhao Mo , Li Xu , Yun Chen , Yu Zhang , Zhichong Qi , Hui Xu , Henan Li . Engineering Multiple Optimization Strategy on Bismuth Oxyhalide Photoactive Materials for Efficient Photoelectrochemical Applications. Acta Physico-Chimica Sinica, 2025, 41(2): 100014-. doi: 10.3866/PKU.WHXB202309047
Ru SONG , Biao WANG , Chunling LU , Bingbing NIU , Dongchao QIU . Electrochemical properties of stable and highly active PrBa0.5Sr0.5Fe1.6Ni0.4O5+δ cathode material. Chinese Journal of Inorganic Chemistry, 2025, 41(4): 639-649. doi: 10.11862/CJIC.20240397
Meiqing Yang , Lu Wang , Haozi Lu , Yaocheng Yang , Song Liu . Recent Advances of Functional Nanomaterials for Screen-Printed Photoelectrochemical Biosensors. Acta Physico-Chimica Sinica, 2025, 41(2): 100018-. doi: 10.3866/PKU.WHXB202310046
Shengbiao Zheng , Liang Li , Nini Zhang , Ruimin Bao , Ruizhang Hu , Jing Tang . Metal-Organic Framework-Derived Materials Modified Electrode for Electrochemical Sensing of Tert-Butylhydroquinone: A Recommended Comprehensive Chemistry Experiment for Translating Research Results. University Chemistry, 2024, 39(7): 345-353. doi: 10.3866/PKU.DXHX202310096
Jiarong Feng , Yejie Duan , Chu Chu , Dezhen Xie , Qiu'e Cao , Peng Liu . Preparation and Application of a Streptomycin Molecularly Imprinted Electrochemical Sensor: A Suggested Comprehensive Analytical Chemical Experiment. University Chemistry, 2024, 39(8): 295-305. doi: 10.3866/PKU.DXHX202401016
. . Chinese Journal of Inorganic Chemistry, 2024, 40(12): 0-0.
Xin Zhou , Zhi Zhang , Yun Yang , Shuijin Yang . A Study on the Enhancement of Photocatalytic Performance in C/Bi/Bi2MoO6 Composites by Ferroelectric Polarization: A Recommended Comprehensive Chemical Experiment. University Chemistry, 2024, 39(4): 296-304. doi: 10.3866/PKU.DXHX202310008
Xiangyu CAO , Jiaying ZHANG , Yun FENG , Linkun SHEN , Xiuling ZHANG , Juanzhi YAN . Synthesis and electrochemical properties of bimetallic-doped porous carbon cathode material. Chinese Journal of Inorganic Chemistry, 2025, 41(3): 509-520. doi: 10.11862/CJIC.20240270
Cen Zhou , Biqiong Hong , Yiting Chen . Application of Electrochemical Techniques in Supramolecular Chemistry. University Chemistry, 2025, 40(3): 308-317. doi: 10.12461/PKU.DXHX202406086
Tingting Jiang , Jing Chang . Application of Ideological and Political Education in Chemical Analysis Experiment under the Background of Emerging Engineering Education: Taking the Redox Titration Experiment as an Example. University Chemistry, 2024, 39(2): 168-174. doi: 10.3866/PKU.DXHX202308007
Jingwen Wang , Minghao Wu , Xing Zuo , Yaofeng Yuan , Yahao Wang , Xiaoshun Zhou , Jianfeng Yan . Advances in the Application of Electrochemical Regulation in Investigating the Electron Transport Properties of Single-Molecule Junctions. University Chemistry, 2025, 40(3): 291-301. doi: 10.12461/PKU.DXHX202406023
Qianwen Han , Tenglong Zhu , Qiuqiu Lü , Mahong Yu , Qin Zhong . 氢电极支撑可逆固体氧化物电池性能及电化学不对称性优化. Acta Physico-Chimica Sinica, 2025, 41(1): 2309037-. doi: 10.3866/PKU.WHXB202309037
Jiahong ZHENG , Jiajun SHEN , Xin BAI . Preparation and electrochemical properties of nickel foam loaded NiMoO4/NiMoS4 composites. Chinese Journal of Inorganic Chemistry, 2024, 40(3): 581-590. doi: 10.11862/CJIC.20230253
Qin ZHU , Jiao MA , Zhihui QIAN , Yuxu LUO , Yujiao GUO , Mingwu XIANG , Xiaofang LIU , Ping NING , Junming GUO . Morphological evolution and electrochemical properties of cathode material LiAl0.08Mn1.92O4 single crystal particles. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1549-1562. doi: 10.11862/CJIC.20240022
Qingtang ZHANG , Xiaoyu WU , Zheng WANG , Xiaomei WANG . Performance of nano Li2FeSiO4/C cathode material co-doped by potassium and chlorine ions. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1689-1696. doi: 10.11862/CJIC.20240115