原子层沉积技术在电分析化学中的应用研究进展

刘金正 张立学

引用本文: 刘金正, 张立学. 原子层沉积技术在电分析化学中的应用研究进展[J]. 分析化学, 2021, 49(11): 1767-1778. doi: 10.19756/j.issn.0253-3820.210481 shu
Citation:  LIU Jin-Zheng,  ZHANG Li-Xue. Progress in Application of Atomic Layer Deposition Technique in Electroanalytical Chemistry[J]. Chinese Journal of Analytical Chemistry, 2021, 49(11): 1767-1778. doi: 10.19756/j.issn.0253-3820.210481 shu

原子层沉积技术在电分析化学中的应用研究进展

    通讯作者: 张立学,E-mail:zhanglx@qdu.edu.cn
  • 基金项目:

    国家自然科学基金项目(No.21775078)资助。

摘要: 电化学分析技术在生物活性分子和气体的高灵敏检测领域获得了广泛应用,但高性能电分析用电极材料的可控制备仍然是一个极具挑战性的难题。原子层沉积技术可通过连续的自限制性半反应实现薄膜材料和纳米材料的精准制备,为高性能的电分析用电极材料的制备提供了一种新颖简单、精细可控的方法。本文概括了原子层沉积技术的原理和特点,着重评述了原子层沉积技术在电化学检测生物分子和气体分子领域的应用进展,并对原子层沉积技术在电分析化学领域的应用前景进行了展望。

English


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