Citation: HONG Yi, YU Zhi, MAI Ze-Bin, LI Ming, WAN Xiang, CHEN Lei, TAN Guo-Bin, LI Lei, HUANG Zheng-Xu. Development of Time-of-Flight Mass Spectrometer for Detection of High Energy Ion and Its Application in Plasma Diagnosis[J]. Chinese Journal of Analytical Chemistry, ;2021, 49(12): 1970-1976. doi: 10.19756/j.issn.0253-3820.210474 shu

Development of Time-of-Flight Mass Spectrometer for Detection of High Energy Ion and Its Application in Plasma Diagnosis

HONG Yi ¹ ,
YU Zhi ² ,
MAI Ze-Bin ² ,
LI Ming ³ ,
WAN Xiang ³ ,
CHEN Lei ³ ,
TAN Guo-Bin ^2,4 ,
LI Lei ⁴ ,
HUANG Zheng-Xu ^4,,

1.
Institute of Environmental Pollution and Health, School of Environmental and Chemical Engineering, Shanghai University, Shanghai 200444, China;
2.
Guangzhou Hexin Analytical Instrument CO., LTD., Guangzhou 510530, China;
3.
Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China);
4.
Institute of Mass Spectrometer and Atmospheric Environment, Jinan University, Guangzhou 510632, China

Corresponding author: HUANG Zheng-Xu, zx.huang@hxmass.com
Received Date: 29 April 2021
Revised Date: 1 October 2021

Fund Project: Supported by the Project for Additive Manufacturing and Laser Manufacturing (No.2017YFB1103903) and the Guangdong Province "Precision Medicine and Stem Cells" Major Science and Technology Project (No.2019B020231002).

The development and improvement of instrument for diagnosis of high energy ion generated by the method such as vaccum discharge is very important for improving the research level of high energy plasma. In this work, a time-of-flight mass spectrometer (TOF-MS) for diagnosis of high-energy ion was developed, and the qualitative analysis of high energy ions (H⁺, H²⁺, C²⁺, Al³⁺, C⁺, Al²⁺, O⁺ and Al⁺) between 10 and 150 keV was carried out on the basis of aluminum vacuum discharge ion source. The influence of pulse width and voltage of ion gate on performance of TOF-MS was optimized, and it was found that, when the pulse width was 100 ns and the accelerating voltages were 20 kV and 50 kV, respectively, the best voltages of ion gate were ±500 V and ±2500 V. Besides, it was found that the mass resolution was 22 FWHM (Full width at half maximum) when the accelerating voltage was 50 kV. Temporal variation of intensity of different ions was further studied by changing the delay time of pulse of ion gate.
- Time-of-flight mass spectrometer,
- Plasma analysis,
- Vacuum discharge
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沈阳化工大学材料科学与工程学院沈阳 110142