Citation: LIU Qi-Yong, FENG Fei, CHEN Bo-Xin, ZHAO Yang-Yang, ZHAO Bin. Study of Micro Helium Ionization Detector with Counter-Intake Structure[J]. Chinese Journal of Analytical Chemistry, ;2021, 49(11): 1816-1823. doi: 10.19756/j.issn.0253-3820.210470 shu

Study of Micro Helium Ionization Detector with Counter-Intake Structure

LIU Qi-Yong ^1,2 ,
FENG Fei ^1,, ,
CHEN Bo-Xin ^1,2 ,
ZHAO Yang-Yang ¹ ,
ZHAO Bin ¹

1.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: FENG Fei, fengfei507@mail.sim.ac.cn
Received Date: 27 April 2021
Revised Date: 1 September 2021

Fund Project: Supported by the National Key R&D Program of China (No.2018YFA0208504), the Strategic Priority Research Program of Chinese Academy of Sciences (No.XDA22020504) and the National Natural Science Foundation of China (Nos.61805269, 61172151).

A micro helium ionization detector (μHID) with counter-intake structure was designed and fabricated by micro-electro-mechanical system (MEMS) technology. The flow field simulation demonstrated that this counter-intake structure brought a "quasi-zero velocity" zone with high gas pressure between excitation electrodes pairs, which contained stable helium with high density, and it was beneficial to excite and stabilize the helium plasma to reduce the baseline noise caused by plasma shaking. The test results of the fabricated μHID demonstrated that stable helium plasma was excited in the "quasi-zero velocity" zone with high gas pressure caused by counter-intake structure, which was consistent with the transient plasma simulation. The baseline noise was below 6 μV. This micro helium ionization detector was successfully used for detection of methylbenzene and ethylbenzene at volume concentration of 0.0001%, showing a low detection limit.
- Helium ionization detector,
- Counter-intake structure,
- Micro gas chromatography,
- Micro-electro-mechanical systems
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