具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究

引用本文: 袁欢, 杜晓松, 徐明, 张传武, 陈向东. 具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究[J]. 分析化学, 2021, 49(5): 686-692. doi: 10.19756/j.issn.0253-3820.201397 shu

Citation: YUAN Huan, DU Xiao-Song, XU Ming, ZHANG Chuan-Wu, CHEN Xiang-Dong. Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column[J]. Chinese Journal of Analytical Chemistry, 2021, 49(5): 686-692. doi: 10.19756/j.issn.0253-3820.201397 shu

具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究

袁欢 ^{1,2,
,} ,
杜晓松 ^2, ,
徐明 ^1, ,
张传武 ^1, ,
陈向东 ^3,

1.
西南民族大学, 电子信息工程国家民委重点实验室, 成都 610041;
2.
电子科技大学, 电子薄膜与集成器件国家重点实验室, 成都 610054;
3.
西南交通大学, 信息科学与技术学院, 成都 611756

通讯作者: 袁欢,E-mail:yuanhuanwill@126.com

基金项目:
西南民族大学中央高校基本科研业务费（No.2020PTJS19002）、四川省科学技术厅科研项目（No.2018JY0338）和国家自然科学基金项目（No.61901401）资助。

摘要: 区别于传统的矩形槽道微型气相色谱柱，本研究利用微机电系统（MEMS）刻蚀技术在硅表面制备了一种波浪形槽道的半填充微型气相色谱柱，柱长2 m，刻蚀深度300 μm，宽80 μm。通过有限元分析软件模拟仿真，考察了镶嵌在波浪形色谱槽道内的半填充柱尺寸、形状和空间分布的流场分布，进而得到最优化的微型气相色谱柱制备参数。仿真研究表明，波浪形槽道内的半填充柱可以有效增加固定相面积；同时，在气-固两相间分配的组分的有效距离变短而改变层流效应。基于优化的参数制备出的波浪形半填充微型气相色谱柱用于分离苯和甲苯，二者在1.5 min内可实现快速分离。考察了8种烷烃类混合物的分离效果，结果表明，波浪形半填充微型气相色谱成功分离8种组分，塔板数达到4790 plates/m。

关键词:

English

Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column

1.
Key Laboratory of Electronic and Information Engineering, State Ethnic Affairs Commission, Southwest Minzu University, Chengdu 610041, China;
2.
State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;
3.
School of Information Science and Technology, Southwest Jiaotong University, Chengdu 611756, China

Corresponding author: YUAN Huan, yuanhuanwill@126.com

Received Date: 08 July 2020
Revised Date: 24 February 2021
Fund Project:
Supported by the Fundamental Research Funds for the Central Universities, Southwest Minzu University (No. 2020PTJS19002), the Sichuan Department of Science and Technology (No. 2018JY0338) and the National Natural Science Foundation of China (No.61901401).

Abstract: A 200-cm-long, 300 μm-depth and 80 μm-wide gas chromatographic (GC) column was fabricated on the silicon chip by microelectromechanical system (MEMS) technique in this work. Unlike the traditional open gas chromatographic column, the design and fabrication of the MEMS-based GC column folded in a wavy configuration which was filled with a circular micro column with a diameter of 30 μm. The size, shape and distribution of the semi-packed column in the prepared micro-chromatographic column were analyzed by finite element analysis software to obtain the optimized preparation parameters. The simulation revealed that MEMS-based semi-packed gas chromatography wavy column achieved an even flow velocity, resulting in a successive improvement of the flow uniformity at the zones between two adjacent bends, as well as a more nonsymmetric distribution at the bends. Benzene and toluene were separated by the fabricated GC column within 1.5 min. In addition, the N-alkane component were separated and the plate number reached 4790 plates/m.

Key words:

Microelectromechanical system
/ Microfabricated gas chromatography column
/ Separation efficiency
/ Semi-packed column

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具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究

通讯作者: 袁欢,E-mail:yuanhuanwill@126.com

English

Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column

Corresponding author: YUAN Huan, yuanhuanwill@126.com

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通讯作者: 陈斌, bchen63@163.com

中国化学会秘书处

具有快速分离效果基于微机电系统的波浪形半填充微型气相色谱柱的研究

通讯作者: 袁欢,E-mail:yuanhuanwill@126.com

English

Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column

Corresponding author: YUAN Huan, yuanhuanwill@126.com

CCS Chemistry：嵌段共聚物自组装成 “三明治”二维有机材料，实现纳米级压力传感功能

CCS Chemistry：颜徐州、鲍哲南： 你的皮肤可能是一片SPMs

CCS Chemistry：工作高效不疲劳，只须让催化剂动起来

CCS Chemistry：静电组装导向聚合- 聚电解质纳米凝胶量化制备新策略

CCS Chemistry：金黄色葡萄球菌醛基脱氢酶是如何识别特异性底物的？

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