Citation: SUN Lan-Xiang, WANG Wei, TIAN Xue-Yong, ZHANG Peng, QI Li-Feng, ZHENG Li-Ming. Progress in Research and Application of Micro-laser-induced Breakdown Spectroscopy[J]. Chinese Journal of Analytical Chemistry, ;2018, 46(10): 1518-1527. doi: 10.11895/j.issn.0253-3820.181150 shu

Progress in Research and Application of Micro-laser-induced Breakdown Spectroscopy

SUN Lan-Xiang ^1,2,3, ,
WANG Wei ^1,2,3,4 ,
TIAN Xue-Yong ⁵ ,
ZHANG Peng ^1,2,3,4 ,
QI Li-Feng ^1,2,3 ,
ZHENG Li-Ming ^1,2,3

1.
Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China;
2.
Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China;
3.
Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, China;
4.
University of Chinese Academy of Sciences, Beijing 100049, China;
5.
Central Research Institute, SIASUN Robot and Automation Co. Ltd, Shenyang 110168, China

Received Date: 11 March 2018
Revised Date: 13 August 2018

Fund Project: This work was supported by the National Key Research and Development Program of China (No. 2017YFF0106202), the National Natural Science Foundation of China (No. 61473279), the Key Research Program of Frontier Sciences, CAS (NO. QYZDJ-SSW-JSC037) and the Youth Innovation Promotion Association, CAS.

The technique of micro-laser-induced breakdown spectroscopy usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to macro-laser-induced breakdown spectroscopy, it can provide more abundant form, structure, and content information in a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of micro-laser-induced breakdown spectroscopy in the selection of laser source and the structure of optical path system were introduced, and its application in metal, semiconductor, animal and plant fields was reviewed. The existing issues and potential development direction were also pointed out.
- Laser-induced breakdown spectroscopy,
- Microanalysis,
- Ablation crater,
- Segregation,
- Review
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