Citation: YANG Ning-Ning, YA Jing, HU Feng-Jiao, GUO Xiao-Lin. Effects of Different Substrates on the Optical Properties of TiO₂ and SiO₂ Films[J]. Chinese Journal of Inorganic Chemistry, ;2015, 31(7): 1315-1320. doi: 10.11862/CJIC.2015.199 shu

Effects of Different Substrates on the Optical Properties of TiO₂ and SiO₂ Films

1.
Tianjin Chengjian University, School of Materials Science and Engineering, Tianjin 300384, China

Corresponding author: YA Jing,
Received Date: 20 November 2014
Available Online: 24 April 2015
Fund Project: 天津市薄膜光学重点实验室开放基金(No.JHWX130492)资助项目。 (No.JHWX130492)

TiO₂ and SiO₂ thin films were respectively deposited on K9 glass, monocrystalline silicon and quartz glass substrates by using the sol-gel method. The surface morphology and optical properties of the films were characterized by SEM, UV-Vis and spectroscopic ellipsometer. Among the three substrates, on the monocrystalline silicon substrate TiO₂ and SiO₂ thin films have the largest refractive index; On the amorphous K9 glass and quartz glass substrate, refractive index and light transmittance of TiO₂ film are quite different; On the amorphous substrate, refractive index and light transmittance of SiO₂ are similar; SiO₂ and TiO₂ film have a law that with increased the number of wavelength, the refractive index and extinction coefficient reduced; Cauchy model could describe optical properties of films very on the silicon substrate well in 300~700 nm waveband.
- sol-gel;spectroscopic ellipometry;substrate;optical constants;microstructure
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沈阳化工大学材料科学与工程学院沈阳 110142

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Effects of Different Substrates on the Optical Properties of TiO₂ and SiO₂ Films