Citation: CHU Xiao-Fei, HE Yun-Qiu, LI Yi-Ming, HUANG He-Zhou, LIU De-Yu, CHEN Hui-Min, LI Wen-You. Sb Doped ZnSnO₃ Transparent and Conducting Thin Films：Preparation and Property[J]. Chinese Journal of Inorganic Chemistry, ;2014, 30(5): 1212-1220. doi: 10.11862/CJIC.2014.169 shu

Sb Doped ZnSnO₃ Transparent and Conducting Thin Films：Preparation and Property

1.
Department of Materials Science and Engineering, Tongji University, Shanghai, 201800, China

Received Date: 18 November 2013
Available Online: 17 February 2014
Fund Project: 国家自然科学基金(No.51175162)资助项目。 (No.51175162)

Undoped and Sb doped ZnSnO₃ thin films were synthesized by a sol-gel spin-coating method. Acomparative study between these films was presented. The structure, electrical and optical properties of ZnSnO₃ thin films doped with 0mol%, 1mol%, 8mol% and 30mol% of Sb were investigated by X-ray diffraction (XRD), field emission-scanning electron microscope (FE-SEM), X-ray photoelectron spectroscope (XPS), Hall measurement and ultraviolet-visible spectroscope (UV-Vis). The results show that all films correspond to a pure phase of ZnSnO₃ structure and that Sb doped ZnSnO₃ films have lower resistivity than those of undoped ZnSnO₃ films. The minimum resistivity is obtained in ZnSnO₃ films doped with 8.0mol% of Sb. In addition, interstitial zinc ions introduced by antimony ion doping in ZnSnO₃ crystal lattice lead to a better conductivity. Furthermore, all doped ZnSnO₃ films are with >80% transmittance in the region above 475 nm.
- conducting;transparent;films;sol-gel
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沈阳化工大学材料科学与工程学院沈阳 110142

Sb Doped ZnSnO3 Transparent and Conducting Thin Films：Preparation and Property

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Sb Doped ZnSnO₃ Transparent and Conducting Thin Films：Preparation and Property