Recent Advancement of Chemical-Mechanical Polishing Technology of Metal

• HE Han-Wei ^{a, ,} ,
• HU Yue-Hua ^b, ,
• ZHOU Ke-Chao ^a, ,
• XU Jin ^b,

• 1.

  a State Key Laboratory of Powder Metallutgy, Central South University, Changsha 410083;

• 2.

  b School of Resources Processing and Bioengineering, Central South University, Changsha

Corresponding author: 何捍卫,男,1964年生,博士后,副教授;E-mail:hehanwei@163.com;研究方向:应用电化学

• Received Date: 29 August 2002
  
• Fund Project:

  国家杰出青年科学基金资助(59925412)