大气压射频等离子体化学气相沉积TiO<sub>2</sub>体系的发射光谱诊断

引用本文: 常大磊, 李小松, 赵天亮, 朱爱民. 大气压射频等离子体化学气相沉积TiO₂体系的发射光谱诊断[J]. 物理化学学报, 2013, 29(03): 625-630. doi: 10.3866/PKU.WHXB201212271 shu

Citation: CHANG Da-Lei, LI Xiao-Song, ZHAO Tian-Liang, ZHU Ai-Min. Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma[J]. Acta Physico-Chimica Sinica, 2013, 29(03): 625-630. doi: 10.3866/PKU.WHXB201212271 shu

大气压射频等离子体化学气相沉积TiO₂体系的发射光谱诊断

基金项目:
国家自然科学基金(10835004, 51077009)资助项目 (10835004, 51077009)

摘要:

开展了大气压射频(RF)等离子体化学气相沉积(PCVD)TiO₂放电体系的发射光谱诊断研究, 分别考察了氧气分压、钛酸四异丙酯(TTIP)分压和输入功率对氧原子谱线相对强度、氩原子激发温度、OH振动温度以及转动温度的影响. 结果表明: 随着氧气分压的增加, 氧原子谱线相对强度先迅速增加至峰值后缓慢下降, OH振动温度缓慢增加, 而氩原子激发温度和OH转动温度基本不变. 随着TTIP 分压的增加, 氧原子谱线相对强度下降, 氩原子激发温度没有明显变化, 而OH振动温度和转动温度增加. 随着输入功率的增加, 氧原子谱线相对强度下降, 氩原子激发温度、OH振动温度和转动温度升高.

关键词:

English

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma

1.
Laboratory of Plasma Physical Chemistry, Dalian University of Technology, Dalian 116024, Liaoning Province, P. R. China
Received Date: 16 October 2012
Available Online: 25 February 2013
Fund Project:
国家自然科学基金(10835004, 51077009)资助项目

Abstract:

Diagnosis of emission spectroscopy on chemical vapor deposition (PCVD) of TiO₂ with atmospheric-pressure radio frequency (RF) plasma was studied. The dependences of relative intensity of atomic oxygen line, Ar excitation temperature, OH rotational and vibrational temperatures were investigated on partial pressures of O₂ and titanium tetraisopropoxide (TTIP) and input power, respectively. The relative intensity of the atomic oxygen line rapidly increased to a maximum and slowly decreased with increasing O₂ partial pressure. OH vibrational temperature gradually increased, whereas Ar excitation temperature and OH rotational temperature showed little change. The relative intensity of the atomic oxygen line decreased, Ar excitation temperature remained constant, and OH vibrational and rotational temperatures increased with increasing TTIP partial pressure. The relative intensity of atomic oxygen line decreased, whereas the Ar excitation temperature and OH vibrational and rotational temperatures increased with increasing input power.

Key words:

Atmospheric-pressure radio frequency plasma
/ Dielectric barrier discharge
/ Plasma chemical vapour deposition
/ Diagnosis of optical emission spectrum
/ TiO₂

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1.
沈阳化工大学材料科学与工程学院沈阳 110142

大气压射频等离子体化学气相沉积TiO₂体系的发射光谱诊断

English

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma

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通讯作者: 陈斌, bchen63@163.com

中国化学会秘书处

大气压射频等离子体化学气相沉积TiO2体系的发射光谱诊断

English

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO2 System with Atmospheric-Pressure Radio Frequency Plasma

CCS Chemistry：嵌段共聚物自组装成 “三明治”二维有机材料，实现纳米级压力传感功能

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CCS Chemistry：工作高效不疲劳，只须让催化剂动起来

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通讯作者: 陈斌, bchen63@163.com

中国化学会秘书处

大气压射频等离子体化学气相沉积TiO₂体系的发射光谱诊断

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma

CCS Chemistry：颜徐州、鲍哲南：你的皮肤可能是一片SPMs