Abstract: In saturated Ca(OH)₂ solutions,CaMoO₄ thin films with scheelite structure were prepared by potentiostatic anode oxidation method.The influence of solution acidity and the method of substrate pretreatment on the film growth as well as the change of current during the deposition were studied,and the crystal phase structure,surface morphology,chemical compositions as well as photoluminescence at room temperature were investigated by XRD,SEM,XPS and FA (fluorescence analysis),respectively.The results revealed that the grain growth was more complete for the CaMoO₄ films deposited on polished substrate,and the grain size was larger and the photoluminescence at room temperature better than that of CaMoO₄ films deposited on the substrate etched by mixture acids.When the solution pH exceeded 12.30,cluster growth of the grains was observed.Therefore,it is better to prepare CaMoO₄ films by potentiostatic anode oxidation method on polished substrate,and to control the solution pH at about 12.00.